Dicing film

Patent metadata

Field	Value
Publication number	US-9570335-B2
Application number	US-201113822356-A
Country	US
Kind code	B2
Filing date	Sep 13, 2011
Priority date	Sep 13, 2010
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

According to the invention, a dicing film, which generates a small amount of scrapes and beard-like burrs during dicing and furthermore has desirable strength and external appearance, is provided. The dicing film according to the invention has an adhesive layer on at least one surface of a base film, wherein the base film contains a copolymer (A) of at least two kinds of alkyl(meth)acrylates and styrene; and a styrene-based elastomer (B). The copolymer (A) of at least two kinds of alkyl(meth)acrylates and styrene is a styrene-alkyl methacrylate-alkyl acrylate copolymer.

First claim

The invention claimed is:

1. A method for using a dicing film which has an adhesive layer on at least one surface of a base film in a dicing process for manufacturing a semiconductor,
wherein the base film consists of a copolymer (A) of at least two kinds of alkyl (meth)acrylates and styrene; and a styrene-based elastomer (B);
wherein the copolymer (A) of at least two kinds of alkyl (meth)acrylates and styrene is a styrene-alkyl methacrylate-alkyl acrylate copolymer;
wherein the styrene-based elastomer (B) is a hydrogenated styrene-isoprene-styrene copolymer; and
wherein the weight ratio (NB) of the copolymer (A) of at least two kinds of alkyl (meth)acrylates and styrene to the styrene-based elastomer (B) in the base film is 65/35 to 45/55.

2. The method for using a dicing film according to claim 1 ,
wherein a breaking energy of the base film is greater than or equal to 15 mJ, wherein the breaking energy is determined by an evaluation test, the evaluation test comprising:
forming a cross-shaped slit on a single surface of the base film, the cross-shaped slit having a depth of 80 μm and a length of at least 40 mm, the base film having a thickness of 150 μm, wherein the single surface is set to a lower side;
performing a falling weight test on an intersection in the cross-shaped slit using: a weight of 1.02 kg having a hemispherical shape with a diameter of 20 mm, and the base film having a circular shape with a diameter of 40 mm; and
determining the breaking energy based on whether the base film is broken by the falling weight and the potential energy of the weight before falling.

3. The method for using dicing film according to claim 1 ,
wherein the adhesive layer contains an acrylic adhesive having a polar group.

4. The method for using a dicing film according to claim 1 ,
wherein the adhesive layer contains butyl acrylate having a carboxyl group.

Assignees

• Maruyama Kazuhiko
• Isobe Masatoshi
• Sumitomo Bakelite Co

Inventors

• Maruyama Kazuhiko
• Isobe Masatoshi

Classifications

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/742

  involving stretching of the auxiliary support post dicing · CPC title

• H10P72/7402 Primary

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title

• C09J153/02

  Vinyl aromatic monomers and conjugated dienes · CPC title

• H01L2221/68327

  Electricity · mapped topic