Melt purification and delivery system

Patent metadata

Field	Value
Publication number	US-9567691-B2
Application number	US-48711909-A
Country	US
Kind code	B2
Filing date	Jun 18, 2009
Priority date	Jun 20, 2008
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

An apparatus to purify a melt is disclosed. A first portion of a melt in a chamber is frozen in a first direction. A fraction of the first portion is melted in the first direction. A second portion of the melt remains frozen. The melt flows from the chamber and the second portion is removed from the chamber. The freezing concentrates solutes in the melt and second portion. The second portion may be a slug with a high solute concentration. This system may be incorporated into a sheet forming apparatus with other components such as, for example, pumps, filters, or particle traps.

First claim

What is claimed is:

1. A method of purifying comprising:
providing a melt in a chamber, the chamber having a first end and second end;
translating a cooler and a heater that are external to the chamber along a first direction relative to the chamber from the first end toward the second end with the heater trailing the cooler;
freezing in said first direction a first portion of a melt in said chamber from the first end toward the second end;
melting a fraction of said first portion of said melt in said first direction from the first end toward the second end whereby a second portion of said melt remains frozen;
flowing said melt from said chamber; and
removing said second portion from said chamber.

2. The method of claim 1 , wherein said melt is selected from the group consisting of silicon, silicon and germanium, gallium, and gallium nitride.

3. The method of claim 1 , further comprising concentrating solutes in said melt and said second portion during said freezing.

4. The method of claim 1 , wherein said removing comprises dropping said second portion from said chamber.

5. The method of claim 1 , wherein said removing comprises melting said second portion and flowing said second portion from said chamber.

6. An apparatus for forming a sheet comprising:
a crucible configured to form a melt;
a first pump in fluid communication with said crucible;
a purifying system in fluid communication with said first pump, wherein the purifying system comprises:
a chamber defining a cavity, an inlet, and an outlet, the chamber having a first end and second end;
a cooler disposed external to the chamber;
a heater disposed external to the chamber; and
a translation mechanism configured to translate said cooler and said heater along a first direction relative to said chamber from the first end toward the second end with the heater trailing the cooler;
a second pump in fluid communication with said purifying system; and
a sheet forming apparatus configured to freeze said melt to form a sheet, said sheet forming apparatus in fluid communication with said second pump along a first path, said sheet forming apparatus comprising a vessel defining a channel configured to hold said melt and a cooling plate disposed above said melt.

7. The apparatus of claim 6 , wherein said sheet forming apparatus comprises a spillway and said melt and said sheet flow within said channel toward said spillway.

8. The apparatus of claim 6 , further comprising a filter.

9. The apparatus of claim 6 , further comprising a particle trap.

10. The apparatus of claim 6 , further comprising a third pump in fluid communication with said purifying system, wherein said sheet forming apparatus is in fluid communication with said third pump.

11. The apparatus of claim 6 , further comprising a second path between said sheet forming apparatus and said second pump, said second path configured to allow circulation of said melt to said sheet forming apparatus.

12. The apparatus of claim 6 , wherein said sheet forming apparatus is in fluid communication with said purifying system.

13. The apparatus of claim 6 , wherein said first pump and said second pump comprise:
the chamber, wherein the chamber defines a cavity configured to hold said melt;
a gas source in fluid communication with said chamber;
a first pipe in fluid communication with said chamber;
a second pipe in fluid communication with said chamber;
a first valve disposed between said first pipe and said chamber; and
a second valve disposed between said chamber and said second pipe.

Assignees

• Kellerman Peter L
• Sinclair Frank
• Carlson Frederick
• Blake Julian G
• Varian Semiconductor Equipment Ass Inc

Inventors

• Kellerman Peter L
• Sinclair Frank
• Carlson Frederick
• Blake Julian G

Classifications

• C30B11/001

  Continuous growth · CPC title

• C30B29/08

  Germanium · CPC title

• C30B28/06

  by normal freezing or freezing under temperature gradient · CPC title

• C30B29/60

  characterised by shape · CPC title

• C30B29/02

  Elements · CPC title