Base film for dicing sheet and dicing sheet

Patent metadata

Field	Value
Publication number	US-9558983-B2
Application number	US-201214235919-A
Country	US
Kind code	B2
Filing date	Sep 5, 2012
Priority date	Sep 16, 2011
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

A base film for a dicing sheet is provided which can suppress dicing debris from generating during the dicing of a cut object without imparting physical energy, such as electron beam or γ ray. The base film for a dicing sheet comprises a resin layer. The resin layer comprises: a norbornene-based resin that is a thermoplastic resin having a norbornene-based compound as at least one type of monomer; and an olefin-based thermoplastic resin other than the norbornene-based resin. The norbornene-based resin in the resin layer has a content of more than 3.0 mass %. A dicing sheet is also provided which comprises: the base film for a dicing sheet; and a pressure-sensitive adhesive layer placed on a surface of the film at the resin layer side.

First claim

The invention claimed is:

1. A dicing-sheet base film, the dicing-sheet base film comprising a first resin layer, wherein
the first resin layer comprises: a norbornene-based resin that is a thermoplastic resin having a norbornene-based compound as at least one type of monomer; and an olefin-based thermoplastic resin other than the norbornene-based resin,
the norbornene-based resin in the first resin layer has a content of more than 3.0 mass % and 60 mass % or less,
the norbornene-based resin has a fluidization temperature of 225° C or less,
the first resin layer comprises a phase separation structure that includes a phase comprising the norbornene-based resin and a phase comprising the olefin-based thermoplastic resin, and
the resin layer has an internal haze value of 7.0% or more and 83.4% or less.

2. The dieing-sheet base film as recited in claim 1 , wherein the norbornene-based resin has a density of 0.98 g/cm 3 or more.

3. The dicing-sheet base film as recited in claim 1 , wherein the norbornene-based resin has a tensile elastic modulus at 23° C. of more than 1.5 GPa.

4. The dicing-sheet base film as recited in claim 1 , wherein the first resin layer has the internal haze value of 7.0% or more and 80% or less.

5. The dicing-sheet base film as recited in claim 1 , wherein the first resin layer has a total luminous transmittance of 75% or more.

6. A dicing sheet comprising: the dicing-sheet base film as recited in claim 1 ; and a pressure-sensitive adhesive layer placed on the dicing-sheet base film.

7. The dicing-sheet base film as recited in claim 1 , wherein the olefin-based thermoplastic resin other than the norbornene-based resin is polyethylene.

8. The dicing-sheet base film as recited in claim 1 , wherein the olefin-based thermoplastic resin other than the norbornene-based resin comprises at least one type of acyclic polyolefin.

9. The dicing-sheet base film as recited in claim 8 , wherein the acyclic polyolefin comprises an ethylene-based polymer.

10. The dicing-sheet base film as recited in claim 8 , wherein the norbornene-based resin has a density of 0.98 g/cm 3 or more.

11. The dicing-sheet base film as recited in claim 8 , wherein the norbornene-based resin has a tensile elastic modulus at 23° C. of more than 1.5 GPa.

12. The dicing-sheet base film as recited in claim 8 , wherein the first resin layer has the internal haze value of 7.0% or more and 80% or less.

13. The dicing-sheet base film as recited in claim 8 , wherein the first resin layer has a total luminous transmittance of 75% or more.

14. The dicing-sheet base film as recited in claim 8 , wherein the dicing-sheet base film further comprises a second resin layer placed on one of the surfaces of the first resin layer, and the second resin layer comprises at least one layer.

15. A dicing sheet comprising: the dicing-sheet base film as recited in claim 8 ; and a pressure-sensitive adhesive layer placed on the dicing-sheet base film.

16. The dicing-sheet base film as recited in claim 1 , wherein the dicing-sheet base film further comprises a second resin layer placed on one of the surfaces of the first resin layer, and the second resin layer comprises at least one layer.

17. A dicing sheet comprising: the dicing-sheet base film as recited in claim 16 ; and a pressure-sensitive adhesive layer placed on a surface of the dicing-sheet base film at the first resin layer side.

18. A method for dicing a cut object, the method comprising:
applying a surface of a dicing sheet to the cut object, the dicing sheet comprising the dicing-sheet base film as recited in claim 1 and a pressure-sensitive adhesive layer placed on the dicing-sheet base film, and the surface of the dicing sheet being a surface of the pressure-sensitive adhesive layer opposite to the dicing-sheet base, and
cutting the cut object on the dicing sheet.

19. The method for dicing a cut object as recited in claim 18 , wherein the olefin-based thermoplastic resin other than the norbornene-based resin is polyethylene.

20. The method for dicing a cut object as recited in claim 18 , wherein the norbornene-based resin has a density of 0.98 g/cm 3 or more.

Assignees

• Taya Naoki
• Ueda Masashi
• Sato Yosuke
• Ito Masaharu
• Lintec Corp

Inventors

• Taya Naoki
• Ueda Masashi
• Sato Yosuke
• Ito Masaharu

Classifications

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/7404

  the wafer tape being a laminate of three or more layers, e.g. including additional layers beyond a base layer and an uppermost adhesive layer · CPC title

• H10P72/7402 Primary

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title

• C09J7/241

  Polyolefin, e.g.rubber · CPC title

• Y10T428/2878

  including addition polymer from unsaturated monomer · CPC title