Method for producing ceramic composite for light conversion
US-9334197-B2 · May 10, 2016 · US
US9543480B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9543480-B2 |
| Application number | US-201113992805-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 2, 2011 |
| Priority date | Dec 10, 2010 |
| Publication date | Jan 10, 2017 |
| Grant date | Jan 10, 2017 |
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A ceramic composite for light conversion comprising a solidified body in which crystalline phases of oxides are three-dimensionally entangled and a method for manufacture thereof. A manufacture method of a ceramic composite for light conversion is characterized in that a polishing step is provided in a chemical mechanical polishing (CMP) process applied to the surface of a solidified body with a structure in which an Al 2 O 3 phase and other phases are three-dimensionally entangled.
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The invention claimed is: 1. A method of manufacturing a ceramic composite for light conversion, comprising: applying a CMP process to a surface of a solidified body with a structure in which an Al 2 O 3 phase and a fluorescent emitting crystalline phase of oxides having a hardness smaller than that of Al 2 O 3 and an alkali resistance higher than that of Al 2 O 3 that are continuously and three-dimensionally entangled with each other, wherein the crystalline phase of oxides is a fluorescence emitting phosphor which is a (Y, Ce) 3 Al 5 O 12 (YAG) phase, and pH of a polishing liquid is adjusted between 11 and 12 when performing a CMP process. 2. The method of manufacturing a ceramic composite for light conversion according to claim 1 , wherein pH of the polishing liquid is adjusted between 11.3 and 11.6. 3. The method of manufacturing a ceramic composite for light conversion according to claim 2 , wherein the polishing liquid contains silica particles and the content thereof is below from 0.1 to 5% by mass. 4. The method of manufacturing a ceramic composite for light conversion according to claim 2 , wherein a pressing load per unit area in the CMP process is from 10 to 50 kPa. 5. The method of manufacturing a ceramic composite for light conversion according to claim 1 , wherein the polishing liquid contains silica particles and the content thereof is below from 0.1 to 5% by mass. 6. The method of manufacturing a ceramic composite for light conversion according to claim 5 , wherein a pressing load per unit area in the CMP process is from 10 to 50 kPa. 7. The method of manufacturing a ceramic composite for light conversion according to claim 1 , wherein a pressing load per unit area in the CMP process is from 10 to 50 kPa. 8. The method of manufacturing a ceramic composite for light conversion according to claim 1 , wherein the step level difference between the Al 2 O 3 phase and the crystalline phase of oxides on the surface of the solidified body is equal to 0.010 μm or less. 9. The method of manufacturing a ceramic composite for light conversion according to claim 8 , wherein the polishing liquid contains silica particles and the content thereof is below from 0.1 to 5% by mass. 10. The method of manufacturing a ceramic composite for light conversion according to claim 9 , wherein a pressing load per unit area in the CMP process is from 10 to 50 kPa. 11. The method of manufacturing a ceramic composite for light conversion according to claim 9 , wherein a pressing load per unit area in the CMP process is from 10 to 50 kPa. 12. A ceramic composite for light conversion comprising a solidified body with a structure in which an Al 2 O 3 phase and a fluorescent emitting crystalline phase of oxides which is a (Y, Ce) 3 Al 5 O 12 (YAG) phase having a hardness smaller than that of Al 2 O 3 and an alkali resistance higher than that of Al 2 O 3 that are continuously and three-dimensionally entangled with each other and a step level difference between the Al 2 O 3 phase and the fluorescent emitting crystalline phase on a surface of the solidified body is equal to 0.010 μm or less.
characterised by the composition of the lapping agent · CPC title
Lapping machines or devices; Accessories (B24B3/00 takes precedence) · CPC title
based on aluminates · CPC title
containing abrasives or grinding agents {(abrasives as such C09K3/14; polishing of semi-conductors H10P52/40)} · CPC title
Yttrium oxide or oxide-forming salts thereof · CPC title
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