Method for producing ceramic composite for light conversion

Patent metadata

Field	Value
Publication number	US-9334197-B2
Application number	US-201214131057-A
Country	US
Kind code	B2
Filing date	Jul 6, 2012
Priority date	Jul 8, 2011
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

A method for producing a ceramic composite for light conversion including first step of forming the step level difference such that an oxide crystal phase other than Al2O3 phase of a surface of a solidified body is in a convex shape relative to an Al2O3 phase by subjecting the surface of the solidified body having a structure in which the Al2O3 phase and the oxide crystal phase other than Al2O3 phase are continuously and three-dimensionally entangled with each other to dry etching, and a second step of reducing the step level difference by subjecting the solidified body subjected to the dry etching to CMP or MP.

First claim

The invention claimed is:

1. A method for producing a ceramic composite for light conversion, comprising:
a first step of forming a step level difference such that an oxide crystal phase other than Al 2 O 3 phase of a surface of a solidified body is in a convex shape relative to an Al 2 O 3 phase by performing dry etching to the surface of the solidified body having a structure in which the Al 2 O 3 phase and the oxide crystal phase other than Al 2 O 3 phase are continuously and three-dimensionally entangled with each other; and
a second step of reducing the step level difference by performing CMP or MP to the solidified body subjected to the dry etching.

2. The method for producing a ceramic composite for light conversion according to claim 1 , wherein the oxide crystal phase other than Al 2 O 3 phase is a fluorescence emitting phosphor, and is a YAG (Y 3 Al 5 O 12 ) phase including Ce or a YAG (Y 3 Al 5 O 12 ) phase containing Ce and Gd.

3. The method for producing a ceramic composite for light conversion according to claim 2 , wherein the step level difference after the second step is 0.005 μm or less.

4. The method for producing a ceramic composite for light conversion according to claim 3 , wherein a processing for reducing the step level difference in the second step is a chemical mechanical polishing (CMP).

5. The method for producing a ceramic composite for light conversion according to claim 4 , wherein slurry containing silica particles in an amount of 0.1% by mass or more and less than 5% by mass is used as a polishing liquid when performing the chemical mechanical polishing (CMP).

6. The method for producing a ceramic composite for light conversion according to claim 5 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

7. The method for producing a ceramic composite for light conversion according to claim 4 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

8. The method for producing a ceramic composite for light conversion according to claim 2 , wherein a processing for reducing the step level difference in the second step is a chemical mechanical polishing (CMP).

9. The method for producing a ceramic composite for light conversion according to claim 8 , wherein slurry containing silica particles in an amount of 0.1% by mass or more and less than 5% by mass is used as a polishing liquid when performing the chemical mechanical polishing (CMP).

10. The method for producing a ceramic composite for light conversion according to claim 9 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

11. The method for producing a ceramic composite for light conversion according to claim 8 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

12. The method for producing a ceramic composite for light conversion according to claim 1 , wherein the step level difference after the second step is 0.005 μm or less.

13. The method for producing a ceramic composite for light conversion according to claim 12 , wherein a processing for reducing the step level difference in the second step is a chemical mechanical polishing (CMP).

14. The method for producing a ceramic composite for light conversion according to claim 13 , wherein slurry containing silica particles in an amount of 0.1% by mass or more and less than 5% by mass is used as a polishing liquid when performing the chemical mechanical polishing (CMP).

15. The method for producing a ceramic composite for light conversion according to claim 14 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

16. The method for producing a ceramic composite for light conversion according to claim 13 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

17. The method for producing a ceramic composite for light conversion according to claim 1 , wherein a processing for reducing the step level difference in the second step is a chemical mechanical polishing (CMP).

18. The method for producing a ceramic composite for light conversion according to claim 17 , wherein slurry containing silica particles in an amount of 0.1% by mass or more and less than 5% by mass is used as a polishing liquid when performing the chemical mechanical polishing (CMP).

19. The method for producing a ceramic composite for light conversion according to claim 18 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

20. The method for producing a ceramic composite for light conversion according to claim 17 , wherein a unit load of 10 to 50 kPa is applied when performing the chemical mechanical polishing (CMP).

Assignees

• Inamori Dai
• Kawano Takafumi
• Ube Industries

Inventors

• Inamori Dai
• Kawano Takafumi

Classifications

• H10W72/20

  Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps · CPC title

• C04B2235/3224

  Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide · CPC title

• C04B2111/80

  Optical properties, e.g. transparency or reflexibility · CPC title

• C04B35/653

  Processes involving a melting step · CPC title

• B24B37/042 Primary

  operating processes therefor · CPC title