Plasma processing method and plasma processing apparatus
US-12437970-B2 · Oct 7, 2025 · US
US9543087B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9543087-B2 |
| Application number | US-201514711254-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 13, 2015 |
| Priority date | Nov 13, 2012 |
| Publication date | Jan 10, 2017 |
| Grant date | Jan 10, 2017 |
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Official abstract text for this publication.
An electrical switching device including at least a nominal contact arrangement, the nominal contact arrangement at least a first nominal contact with a plurality of nominal contact fingers forming a finger cage concentric with respect to a longitudinal axis (z), and at least a mating second nominal contact. An arcing contact arrangement including a first arcing contact and a mating second arcing contact. An arcing contact finger including at its free end a first impact area in which a first contacting to the second arcing contact occurs when closing, the electrical switching device. The first impact area is formed by a first planar surface arranged at an inclination angle (α) larger than zero degrees with respect to the longitudinal axis (z).
Opening claim text (preview).
What is claimed is: 1. An electrical switching device having a longitudinal axis (z), the electrical switching device comprising: at least one contact arrangement, the contact arrangement including a first contact and a mating second contact, the first contact including at least one contact finger; wherein the contact finger is configured to be elastically deformed in a radial direction upon closing the electrical switching device; wherein for closing and opening the electrical switching device at least one of the first contact and the mating second contact is movable parallel to the longitudinal axis (z) and cooperates with the other contact; wherein the contact finger includes, at its free end, a first impact area in which a first contacting to the mating second contact occurs when closing the electrical switching device; and wherein the first impact area is formed by a first planar surface which is arranged at an inclination angle (α) larger than zero degrees with respect to the longitudinal axis (z), wherein the first planar surface is a flat area. 2. The electrical switching device of claim 1 , wherein the at least one contact arrangement includes an arcing contact arrangement; wherein the first contact includes a first arcing contact having at least one arcing contact finger; and wherein the mating second contact includes a mating second arcing contact, and wherein for closing and opening the electric switching device, at least one of the first and second arcing contacts is movable parallel to the longitudinal axis (z) and cooperates with the other arcing contact. 3. The electrical switching device of claim 2 , wherein the first arcing contact includes a plurality of arcing contact fingers forming an arcing contact finger cage concentric with respect to the longitudinal axis (z); and wherein the mating second contact includes a mating second arcing contact. 4. The electrical switching device of claim 2 , wherein the at least one contact arrangement includes a nominal contact arrangement; wherein the first contact is a first nominal contact having a plurality of nominal contact fingers which form a finger cage concentric with respect to the longitudinal axis (z); wherein the mating second contact is a mating second nominal contact; and wherein for closing and opening the electric switching device, at least one of the first and second nominal contacts is movable parallel to the longitudinal axis (z) and cooperates with the other nominal contact. 5. The electrical switching device of claim 4 , wherein the first contact includes at least one additional contact finger having the same shape as the contact finger. 6. The electrical switching device of claim 5 , wherein the contact finger includes a contact area, wherein the first impact area is arranged, when seen along the longitudinal axis (z), between the contact area and a tip of the free end of the contact finger, and wherein the contact finger has contact in the contact area with the second mating contact in an end position of the second mating contact when the electrical switching device is closed. 7. The electrical switching device of claim 1 , wherein the at least one contact arrangement includes a nominal contact arrangement; wherein the first contact includes a first nominal contact having a plurality of nominal contact fingers which form a finger cage concentric with respect to the longitudinal axis (z); wherein the mating second contact includes a mating second nominal contact; and wherein for closing and opening the electric switching device, at least one of the first and second nominal contacts is movable parallel to the longitudinal axis (z) and cooperates with the other nominal contact. 8. The electrical switching device of claim 7 , wherein the nominal contact fingers have the same shape as the first contact which includes at least one arcing contact finger. 9. The electrical switching device of claim 1 , wherein the first contact includes at least one additional contact finger having the same shape as the contact finger. 10. The electrical switching device of claim 1 , wherein the contact finger includes a contact area, wherein the first impact area is arranged, when seen along the longitudinal axis (z), between the contact area and a tip of the free end of the contact finger, and wherein the contact finger has contact in the contact area with the second mating contact in an end position of the second mating contact when the electrical switching device is closed. 11. The electrical switching device of claim 10 , wherein the contact area is formed by a second planar surface which is parallel to the longitudinal axis (z), the second planar surface being a flat area. 12. The electrical switching device of claim 10 , wherein in an opened configuration of the electrical switching device, the contact area is formed by a second planar surface which is inclined with respect to the longitudinal axis (z) in an opposite angular direction than an inclination direction of the first impact area by a compensation angle (β), which substantially equals a deflection angle of the contact finger when the electrical switching device is in a closed configuration, the second planar surface being a flat area. 13. The electrical switching device of claim 10 , wherein on the contact finger a first transition area between the first impact area and the contact area is rounded, and/or on the second mating contact a mating second transition area of the second mating contact is rounded. 14. The electrical switching device of claim 1 , wherein the inclination angle (α) of the first impact area with respect to the longitudinal axis (z) is such that a radial displacement (d) of the contact finger is given by the equation: d = Va · sin α · cos α · ( m k ) , with d being radial displacement of the contact finger, m being a mass of the contact finger, k being a finger stiffness of the contact finger, Va being a relative axial velocity of the second mating contact with respect to the first contact at a time of impact, and α being the inclination angle of the first impact area, and wherein the radial displacement (d) is chosen equal or smaller than a radial clearance (dmax) of the contact finger. 15. The electrical switching device of claim 1 , wherein the second contact includes at its free end a second impact area, in which a first contacting to the contact finger occurs when closing the electrical switching device, the second impact area being a flat area parallel to the first impact area or the second impact area being rounded. 16. The electrical switching device of claim 1 , wherein the in
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