Substrate processing apparatus and substrate processing method

Patent metadata

Field	Value
Publication number	US-9539607-B2
Application number	US-201313944237-A
Country	US
Kind code	B2
Filing date	Jul 17, 2013
Priority date	Jul 19, 2012
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

A substrate is transported based on coordinates information indicating a receiving position of the substrate and a placement position of the substrate by a hand. If the substrate is shifted from a first position, the substrate is received by the hand while a center of the substrate is shifted from a normal position of the hand. The hand that holds the substrate is moved toward a second position. A plurality of portions at an outer periphery of the substrate are detected before the substrate is placed. A shift of the substrate with respect to the normal position of the hand is detected based on the detection result, and the coordinates information is corrected such that a shift between a position of the center of the substrate to be placed at the second position by the hand and the center of the second position is canceled.

First claim

We claim:

1. A substrate processing apparatus that performs processing on a substrate, comprising:
a processing unit that has a supporter supporting the substrate and is configured to perform the processing on the substrate held by the supporter;
a transport device that has a first holder configured to hold the substrate and to be capable of linearly advancing and retreating, and is configured to transport the substrate by moving the first holder;
a storage that stores first control information for controlling the transport device such that the first holder of the transport device places the substrate at a predetermined position on the supporter of the processing unit;
a controller that controls the transport device based on the first control information stored by the storage; and
a plurality of not less than three detectors provided to detect a plurality of not less than three portions at an outer periphery of the substrate being moved by the first holder before the first holder places the substrate on the supporter, so as to detect a shift between a position of the substrate on the supporter and the predetermined position, wherein
the plurality of detectors are arranged along a circular arc that corresponds to the outer periphery of the substrate on a first path on which the first holder advances and retreats, and configured to emit light to the first path and receive reflection light or transmitting light from the first path as returning light to generate output signals indicating presence/absence of receipt of the returning light as detection results, and
the controller is configured to detect time points at which the plurality of portions at the outer periphery of the substrate are detected by the plurality of detectors based on the output signals of the plurality of detectors when the first holder advances or retreats on the first path, to correct the first control information based on the detected respective time points before the first holder places the substrate on the supporter, in order to correct such shift between the position of the substrate on the supporter and the predetermined position, and to control the transport device based on the corrected first control information, to reposition the substrate at the predetermined position on the supporter.

2. The substrate processing apparatus according to claim 1 , wherein
the first holder has a suction holding mechanism that applies suction to one surface of the substrate.

3. The substrate processing apparatus according to claim 1 , wherein
the supporter includes a rotating and holding device that holds and rotates the substrate in a horizontal attitude, and
the processing unit further includes a film processing device that performs processing on a film on the substrate held by the rotating and holding device.

4. The substrate processing apparatus according to claim 3 , wherein
the film processing device includes a film removal mechanism configured to remove a peripheral edge of the film on the substrate held by the rotating and holding device.

5. The substrate processing apparatus according to claim 3 , wherein
the film processing device includes a light irradiation mechanism configured to irradiate a peripheral edge of the film on the substrate held by the rotating and holding device with exposure light.

6. The substrate processing apparatus according to claim 1 , wherein
the processing unit further includes a temperature processing device that performs temperature processing on the substrate, and
the supporter includes a supporting member that supports the substrate on an upper surface of the temperature processing device.

7. The substrate processing apparatus according to claim 1 , wherein
the transport device further has a second holder configured to hold the substrate and to be capable of linearly advancing and retreating, and is configured to transport the substrate by moving the second holder,
the storage stores second control information for controlling the transport device such that the second holder of the transport device places the substrate at the predetermined position of the supporter of the processing unit,
the plurality of detectors are provided to detect a plurality of not less than three portions at an outer periphery of the substrate being moved by the second holder before the second holder places the substrate on the supporter, are arranged along a circular arc that corresponds to the outer periphery of the substrate on a second path on which the second holder advances and retreats, and are configured to emit light to the second path and receive reflection light or transmitting light from the second path as returning light to generate output signals indicating presence/absence of receipt of the returning light as detection results, and
the controller is configured to detect time points at which the plurality of portions at the outer periphery of the substrate are detected by the plurality of detectors based on the output signals of the plurality of detectors when the second holder advances or retreats on the second path, to correct the second control information based on the detected respective time points before the second holder places the substrate on the supporter such that a shift between a position of the substrate to be placed on the supporter by the second holder and the predetermined position is canceled, and to control the transport device based on the corrected second control information.

Assignees

• Dainippon Screen Mfg
• Sokudo Co Ltd
• Screen Holdings Co Ltd
• Screen Semiconductor Solutions Co Ltd

Inventors

• Kuwahara Joji
• Taguchi Takashi
• Kashiyama Masahito
• Iwasaki Kohei

Classifications

• H10P72/0606 Primary

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/53

  using optical controlling means · CPC title

• B05C13/00 Primary

  Means for manipulating or holding work, e.g. for separate articles {(B05C1/0821 takes precedence)} · CPC title

• B25J13/088

  with position, velocity or acceleration sensors · CPC title

• H01L21/67259

  Electricity · mapped topic