Substrate processing apparatus and substrate processing method
US-9539607-B2 · Jan 10, 2017 · US
Screen Semiconductor Solutions Co Ltd holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Sep 6, 2016 |
| Latest publication | Jan 10, 2017 |
Year-over-year patent counts for this assignee.
Latest publications where this party is an assignee.
Representative or frequently cited publications from precomputed assignee stats.
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| Technology | Patents |
|---|---|
| Operations & Transport | 2 |
| Electricity | 2 |
| Physics | 1 |