Mask storage device for mask haze prevention

Patent metadata

Field	Value
Publication number	US-9527649-B2
Application number	US-201414573863-A
Country	US
Kind code	B2
Filing date	Dec 17, 2014
Priority date	Sep 8, 2011
Publication date	Dec 27, 2016
Grant date	Dec 27, 2016

Abstract

A mask storage device for storing a mask used in lithography comprises a desiccant retainer for receiving a desiccant, the desiccant retainer comprising one or more passages. The mask storage device also comprises a first shell and a second shell, the second shell removably attached to the first shell and arranged to form a sealed space with the first shell in a closed state. The desiccant retainer is positioned in the sealed space. The mask storage device also comprises a gasket positioned between the first shell and the second shell. The gasket is configured to create a sufficiently airtight seal between the first shell and the second shell in the closed state. The one or more passages of the desiccant retainer comprise one or more membranes.

First claim

What is claimed is:

1. A mask storage device for storing a mask used in lithography, the mask storage device comprising:
a desiccant retainer for receiving a desiccant, the desiccant retainer comprising one or more passages;
a first shell and a second shell, the second shell removably attached to the first shell and arranged to form a sealed space with the first shell in a closed state, the desiccant retainer positioned in the sealed space and displaceable relative to the sealed space; and
a gasket positioned between the first shell and the second shell and configured to create a sufficiently airtight seal between the first shell and the second shell in the closed state,
wherein the one or more passages of the desiccant retainer comprise one or more membranes.

2. The mask storage device of claim 1 , wherein the desiccant is selected from the group consisting of clays, calcium oxides, silica gels and molecular sieves.

3. The mask storage device of claim 1 , wherein the desiccant is clay, calcium oxide, silica gel, or a molecular sieve.

4. The mask storage device of claim 1 , wherein the desiccant retainer is a container having an inner compartment configured to receive the desiccant.

5. The mask storage device of claim 1 , wherein the first shell and the second shell are constructed of an anti-electrostatic discharge material.

6. The mask storage device of claim 5 , wherein the anti-electrostatic material is acrylonitrile butadiene styrene.

7. The mask storage device of claim 1 , wherein the first shell further comprises a mating surface and the gasket is affixed to the mating surface.

8. The mask storage device of claim 1 , wherein the second shell further comprises a mating surface and the gasket is affixed to the mating surface.

9. The mask storage device of claim 1 , further comprising a latch or a clamp to retain the mask storage device in a closed state.

10. A mask storage device, comprising:
a first shell and a second shell configured to form a sealed space in a closed state; and
a desiccant retainer positioned within the sealed space formed by the first shell and the second shell in the closed state, the desiccant retainer comprising a removable lid and one or more passages configured to allow moisture from outside the desiccant retainer to be absorbed by a desiccant within the desiccant retainer,
wherein the one or more passages of the desiccant retainer comprise one or more membranes.

11. The mask storage device of claim 10 , wherein the first shell and the second shell are constructed of an anti-electrostatic discharge material.

12. The mask storage device of claim 10 , further comprising:
a gasket positioned between the first shell and the second shell.

13. The mask storage device of claim 12 , wherein the first shell comprises a first mating surface, the second shell comprises a second mating surface, and the gasket is between the first mating surface and the second mating surface in the closed state.

14. The mask storage device of claim 10 , further comprising a latch to retain the mask storage device in a closed state.

15. A mask storage device, comprising:
a first shell comprising a desiccant retainer, the desiccant retainer comprising one or more passages, the desiccant retainer being affixed to an inner sidewall of the first shell, along a perimeter of the first shell;
a second shell removably attached to the first shell, the first shell and the second shell being closable to form a sealed space, the sealed space being configured to accommodate one or more masks with the desiccant retainer being positioned within the sealed space; and
a gasket configured to contact the first shell and the second shell,
wherein the one or more passages of the desiccant retainer comprise one or more membranes.

16. The mask storage device of claim 15 , wherein the first shell further comprises a mating surface and the gasket is affixed to the mating surface.

17. The mask storage device of claim 15 , wherein the second shell further comprises a mating surface and the gasket is affixed to the mating surface.

18. The mask storage device of claim 15 , wherein the first shell comprises a first mating surface, the second shell comprises a second mating surface, and the gasket is housed in a gap between first mating surface and the second mating surface in the closed state.

19. The mask storage device of claim 15 , further comprising a latch or a clamp to retain the mask storage device in a closed state.

20. The mask storage device of claim 10 , wherein the desiccant retainer is mounted on a descant support.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chang Yung-Chih
• Chang Chih-Wing

Classifications

• H10W76/10

  Containers or parts thereof · CPC title

• H01L23/02

  Electricity · mapped topic

• H01L2924/0002

  Electricity · mapped topic

• B65D85/70

  for materials not otherwise provided for · CPC title

• B65D55/02

  Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure · CPC title