Method of forming a germanium layer on a silicon substrate

Patent metadata

Field	Value
Publication number	US-9508889-B2
Application number	US-201313916823-A
Country	US
Kind code	B2
Filing date	Jun 13, 2013
Priority date	Dec 15, 2010
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

A method is presented for forming a Ge containing layer on a Si substrate. The method includes providing a crystalline Si substrate having a surface that has a crystallographic orientation, heating the Si substrate in a vacuum environment, exposing the Si substrate to a surfactant that is suitable for growth of the Ge containing layer on the crystalline Si using surfactant mediation, and thereafter growing the Ge containing layer on the surface of the heated Si substrate using a suitable sputtering technique. The conditions of the growth of the Ge containing layer are selected such that a thin Ge containing layer is formed on the surface of the Si substrate. The thin Ge containing layer has a surface that has crystallographic properties suitable for epitaxial growth of a layer of a further material on the surface of the thin Ge containing layer.

First claim

What is claimed is:

1. A method of forming a single crystalline Ge containing layer on a Si substrate, the method comprising the steps of:
providing a crystalline Si substrate having a surface that has a crystallographic orientation;
heating the Si substrate in a vacuum environment;
exposing the Si substrate to a surfactant, the surfactant being H 2 or atomic H; and thereafter
growing the single crystalline Ge containing layer on the surface of the heated Si substrate using surfactant mediation and a suitable sputtering technique,
whereby the sputtering technique with the surfactant mediation forms a heteroepitaxial single crystalline Ge layer on the crystalline Si substrate.

2. The method of claim 1 , wherein the Ge containing layer has a surface that is composed of Ge.

3. The method of claim 1 , wherein the Ge containing layer has a graded concentration profile of material composition and a decreasing concentration of Si in a direction away from the surface of the Si substrate.

4. The method of claim 1 , wherein the Ge containing layer has a thickness of less than 400 nm.

5. The method of claim 1 , wherein the Ge containing layer has a thickness of less than 300 nm.

6. The method of claim 1 , wherein the Ge containing layer has a thickness of less than 200 nm.

7. The method of claim 1 , wherein growth conditions are chosen such that no further annealing and/or polishing is required to achieve crystallographic properties suitable for epitaxial growth of the further material.

8. The method of claim 1 , wherein the suitable sputtering technique is radio-frequency (RF) sputtering.

9. The method of claim 1 , wherein achieving appropriate layer growth conditions comprises setting the temperature of the Si substrate in the range between approximately 350-450° C.

10. The method of claim 7 , wherein appropriate sputter wherein achieving appropriate layer growth conditions comprises setting the temperature of the Si substrate at approximately 400° C.

11. The method of claim 1 , wherein Ge containing layer is suitable for growth of a single crystalline III-V class semiconductor material.

Assignees

• Newsouth Innovations Pty Ltd

Inventors

• Green Martin
• Hao Xiaojing
• Tsao Chao-Yang

Classifications

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title

• H10P14/36

  characterised by treatments done before the formation of the materials · CPC title

• H10P14/22

  using physical deposition, e.g. vacuum deposition or sputtering · CPC title

• Y02E10/544

  Solar cells from Group III-V materials · CPC title