Electronic device, method of manufacturing the electronic device, and method of driving the electronic device
US-9221672-B2 · Dec 29, 2015 · US
Electromechanical system substrate attachment for reduced thermal deformation
US2016257558A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016257558-A1 |
| Application number | US-201514634981-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 2, 2015 |
| Priority date | Mar 2, 2015 |
| Publication date | Sep 8, 2016 |
| Grant date | — |
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Abstract
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A MEMS switch includes a substrate and a switch structure formed on the substrate, with the switch structure further including a conductive contact formed on the substrate, a self-compensating anchor structure coupled to the substrate, and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonally from the self-compensating anchor structure and suspended over the substrate such that the second end comprises a cantilevered portion positioned above the conductive contact. The cantilevered portion of the beam undergoes deformation during periods of strain mismatch between the substrate and the switch structure so as to have a takeoff angle relative to the substrate, and the self-compensating anchor structure directs a portion of the strain mismatch orthogonally to the cantilevered portion so as to warp the anchor and compensate for the takeoff angle of the cantilevered portion.
First claim
Opening claim text (preview).
What is claimed is: 1 . A micro-electromechanical system (MEMS) switch comprising: a substrate; and a switch structure formed on the substrate, the switch structure comprising: a conductive contact formed on the substrate; a self-compensating anchor structure coupled to the substrate; and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonally from the self-compensating…
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Classifications
Electricity · mapped topic
- H01H59/0009Primary
Electricity · mapped topic
- B81B3/0059Primary
Operations & Transport · mapped topic
- B81B3/0072Primary
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US2016257558A1 cover?
- A MEMS switch includes a substrate and a switch structure formed on the substrate, with the switch structure further including a conductive contact formed on the substrate, a self-compensating anchor structure coupled to the substrate, and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonal…
- Who is the assignee on this patent?
- Gen Electric
- What technology area does this patent fall under?
- Primary CPC classification H01H59/0009. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Sep 08 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).