Transfer device for holding an object using a gas flow

Patent metadata

Field	Value
Publication number	US-9490156-B2
Application number	US-201414279699-A
Country	US
Kind code	B2
Filing date	May 16, 2014
Priority date	May 23, 2013
Publication date	Nov 8, 2016
Grant date	Nov 8, 2016

Abstract

A transfer device for holding an object comprises: i) a housing; ii) at least one inlet conduit having an inlet for gas; iii) a plurality of sets of outlet conduits, each set of outlet conduits being in fluid communication with the at least one inlet conduit and having a plurality of outlets for directing the gas out of the outlet conduits. The respective outlets of the sets of outlet conduits are arranged in a direction along the housing surface and away from a center region relative to the respective sets of outlet conduits, so that a laminar gas flow that flows along the housing surface generates a pressure differential which creates a force towards the center region to hold the object against the housing surface.

First claim

The invention claimed is:

1. A transfer device for holding an object, the transfer device comprising:
a housing having a housing surface;
at least one inlet conduit having an inlet for introducing a gas into the at least one inlet conduit;
a plurality of secondary inlet conduits connected to the at least one inlet conduit;
a plurality of sets of outlet conduits being in fluid communication with the at least one inlet conduit, wherein each set of outlet conduits comprises:
a plurality of outlet conduits that branches out radially from a respective secondary inlet conduit away from a single center region relative to the plurality of sets of outlet conduits,
wherein axes of the plurality of outlet conduits, that branches out radially from the respective secondary inlet conduit, diverge from a single point located within the housing; and
a plurality of outlets for directing the gas out of the outlet conduits and away from the single center region relative to the plurality of sets of outlet conduits,

wherein the respective outlets of the sets of outlet conduits are arranged in a direction along the housing surface and away from the single center region relative to the plurality of sets of outlet conduits, so that a laminar gas flow, comprising a sheet of gas, that flows out from the outlets and away from the single center region flows parallel to the housing surface such that a pressure differential is generated which creates a force towards the single center region to hold the object against the housing surface, the plurality of sets of outlet conduits are arranged parallel to the single center region, and all of the plurality of outlets direct the gas out of the outlet conduit away from the single center region.

2. The transfer device of claim 1 , wherein the outlets of the respective sets of outlet conduits are circumferentially arranged with respect to the center region.

3. The transfer device of claim 1 , wherein the at least one inlet conduit branches into a plurality of secondary inlet conduits, and each secondary inlet conduit further branches into a respective set of outlet conduits.

4. The transfer device of claim 3 , wherein each secondary inlet conduit comprises an internal volume that is larger than each of the outlet conduits.

5. The transfer device of claim 1 , wherein the outlet conduits of each set of outlet conduits are radially arranged in a direction along the housing surface.

6. The transfer device of claim 5 , wherein the respective outlets of each set of outlet conduits are arranged along an arc of 90 degrees.

7. The transfer device of claim 1 , wherein the single center region is bounded by parallel sides of the housing.

8. The transfer device of claim 1 , wherein each of the secondary inlet conduits branches out radially from the single center region.

9. The transfer device of claim 1 , further comprising a stopper mounted to the housing surface, the object being placed against the stopper, wherein the stopper defines a separation distance from the housing surface, so that the pressure differential is generated in the separation distance between the housing surface and an opposing surface of the object.

Assignees

• Balakrishnan Sathish Kumar
• Govindan Radhakrishnan Kumaresh
• Tu Wen Ge
• Lu Hongliang
• Tan Lian Hok
• Asm Tech Singapore Pte Ltd

Inventors

• Balakrishnan Sathish Kumar
• Govindan Radhakrishnan Kumaresh
• Tu Wen Ge
• Lu Hongliang
• Tan Lian Hok

Classifications

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• B65G47/911

  with air blasts producing partial vacuum · CPC title

• B25J15/0023

  Gripper surfaces directly activated by a fluid (flexible fingers B25J15/12) · CPC title

• B25B11/005

  Vacuum work holders · CPC title

• H01L21/6838 Primary

  Electricity · mapped topic