Producing a mono-crystalline sheet of semiconductor material

Patent metadata

Field	Value
Publication number	US-9487884-B2
Application number	US-201113698545-A
Country	US
Kind code	B2
Filing date	May 23, 2011
Priority date	May 31, 2010
Publication date	Nov 8, 2016
Grant date	Nov 8, 2016

Abstract

A method for producing a mono-crystalline sheet includes providing at least two aperture elements forming a gap in between; providing a molten alloy including silicon in the gap; providing a gaseous precursor medium comprising silicon in the vicinity of the molten alloy; providing a silicon nucleation crystal in the vicinity of the molten alloy; and bringing in contact said silicon nucleation crystal and the molten alloy. A device for producing a mono-crystalline sheet includes at least two aperture elements at a predetermined distance from each other, thereby forming a gap, and being adapted to be heated for holding a molten alloy including silicon by surface tension in the gap between the aperture elements; a precursor gas supply supplies a gaseous precursor medium comprising silicon in the vicinity of the molten alloy; and a positioning device for holding and moving a nucleation crystal in the vicinity of the molten alloy.

First claim

What we claim is:

1. A method for producing a mono-crystalline sheet of a semiconductor material comprising:
providing at least two aperture elements forming a gap in between;
providing a molten alloy comprising the semiconductor material in the gap between said at least two aperture elements, whereby the molten alloy is held between the gap by surface tension below a horizontal arrangement of the at least two aperture elements;
providing a gaseous precursor medium delivering the semiconductor material in the vicinity of the molten alloy;
providing a nucleation crystal below the molten alloy;
bringing in contact said nucleation crystal and the molten alloy; and
retracting the mono-crystalline sheet of semiconductor material that is continuously growing below the molten alloy.

2. The method of claim 1 , comprising:
positioning the aperture elements and the molten alloy such that the molten alloy is held between the aperture elements by surface tension only.

3. The method of claim 2 , comprising: retracting the nucleation crystal gradually from the molten alloy.

4. The method of claim 3 , comprising: heating the aperture elements.

5. The method of claim 4 , wherein the semiconductor material is released from the gaseous precursor medium comprising the semiconductor material into the molten alloy thereby supersaturating the molten alloy with the semiconductor material.

6. The method of claim 5 , wherein the method is executed under a protective atmosphere.

7. The method of claim 6 , wherein the molten alloy is an eutectic alloy.

8. The method of claim 7 , wherein the gaseous precursor medium comprises at least one of the group of: chlorides, hydrides, and metal-organic compounds from at least silicon, germanium, indium, arsenic, phosphorus, nitrogen or gallium.

9. The method of claim 8 , wherein the aperture elements have a temperature between 350 and 1000 degrees Celsius.

10. The method of claim 9 , comprising providing a doping gas comprising at least one of the group of: silicon, phosphorus, arsenic, carbon, sulfur, boron, and molecules comprising silicon or bromine.

11. The method of claim 10 , comprising providing an etching gas comprising at least one of the group of: chlorine, fluorine, bromine, and molecules comprising chlorine, fluorine, or bromine.

12. The method of claim 11 , wherein the gap between the at least two aperture elements is an elongated slit.

13. The method of claim 12 , comprising, prior to bringing in contact the nucleation crystal, cutting the nucleation crystal along the growth direction.

14. The method of claim 13 , wherein the gaseous precursor medium is provided on a first side of the aperture elements with respect to the molten alloy, and the nucleation crystal is provided on a second side of the aperture elements with respect to the molten alloy.

15. The method of claim 14 , comprising: winding the mono-crystalline silicon sheet on a roll for further processing.

Assignees

• Bjoerk Mikael T
• Riel Heike E
• Schmid Heinz
• IBM

Inventors

• Bjoerk Mikael T
• Riel Heike E
• Schmid Heinz

Classifications

• C30B13/18

  the heating element being in contact with, or immersed in, the molten zone · CPC title

• Y10T117/1032

  Seed pulling · CPC title

• Y02E10/547

  Monocrystalline silicon PV cells · CPC title

• Y02P70/521

  Cross-Sectional Technologies · mapped topic

• C30B11/10 Primary

  Solid or liquid components, e.g. Verneuil method · CPC title