Wafer processing method
US-2024395620-A1 · Nov 28, 2024 · US
US9460952B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9460952-B2 |
| Application number | US-201314237067-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 8, 2013 |
| Priority date | Feb 28, 2012 |
| Publication date | Oct 4, 2016 |
| Grant date | Oct 4, 2016 |
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A film for a pressure-sensitive adhesive tape is a film for a pressure-sensitive adhesive tape, including a non-pressure-sensitive adhesive layer on one surface of a plastic film, where the non-pressure-sensitive adhesive layer includes a mixed layer of a silicone and a (meth)acrylic polymer; and the (meth)acrylic polymer has a calculated Tg of 10° C. or more.
Opening claim text (preview).
The invention claimed is: 1. A film for a pressure-sensitive adhesive tape, comprising a non-pressure-sensitive adhesive layer on one surface of a plastic film, wherein: the non-pressure-sensitive adhesive layer comprises a mixed layer of a silicone and a (meth)acrylic polymer; the (meth)acrylic polymer has a calculated Tg of 10° C. or more, and the non-pressure-sensitive adhesive layer has a phase-separated structure; the monomer components constituting the (meth)acrylic polymer contain a hydroxyl group-containing (meth)acrylic acid ester; and the content of the hydroxyl group-containing (meth)acrylic acid ester in the monomer components constituting the polymer is 2 wt % to 30 wt % with respect to the total amount of the monomer components except the hydroxyl group-containing (meth)acrylic acid ester, the non-pressure-sensitive adhesive layer has an arithmetic average surface roughness Ra of 0.1 μm or more, and the non-pressure-sensitive adhesive layer has a non-pressure-sensitive adhesion test peel strength of less than 1.0 N/20 mm, wherein the phase-separated structure includes a silicone-rich phase and a (meth)acrylic polymer-rich phase. 2. The film for a pressure-sensitive adhesive tape according to claim 1 , wherein the (meth)acrylic polymer has a solubility parameter (SP) value of 9.0 (cal/cm 3 ) 0.5 to 12.0 (cal/cm 3 ) 0.5 . 3. The film for a pressure-sensitive adhesive tape according to claim 1 , wherein the mixing ratio “silicone:(meth)acrylic polymer” between the silicone and the (meth)acrylic polymer in the non-pressure-sensitive adhesive layer is 1:50 to 50:1 in terms of a weight ratio. 4. The film for a pressure-sensitive adhesive tape according to claim 1 , wherein the non-pressure-sensitive adhesive layer has a thickness of 0.01 μm to 10 μm. 5. The film for a pressure-sensitive adhesive tape according to claim 1 , wherein the plastic film has a maximum elongation measured in accordance with JIS-K-7127 of 100% or more. 6. The film for a pressure-sensitive adhesive tape according to claim 1 , wherein the plastic film has a thickness of 20 μm to 200 μm. 7. The film for a pressure-sensitive adhesive tape according to claim 1 , wherein the plastic film contains at least a polyvinyl chloride. 8. A pressure-sensitive adhesive tape, comprising a pressure-sensitive adhesive layer on a surface of the plastic film in the film for a pressure-sensitive adhesive tape according to claim 1 opposite to the non-pressure-sensitive adhesive layer. 9. The pressure-sensitive adhesive tape according to claim 8 , wherein the pressure-sensitive adhesive layer contains at least one (meth)acrylic polymer. 10. The pressure-sensitive adhesive tape according to claim 8 , wherein the pressure-sensitive adhesive layer has an SP value of 9.0 (cal/cm 3 ) 0.5 to 12.0 (cal/cm 3 ) 0.5 . 11. The pressure-sensitive adhesive tape according to claim 8 , further comprising a release liner on a surface of the pressure-sensitive adhesive layer. 12. The pressure-sensitive adhesive tape according to claim 8 , wherein the pressure-sensitive adhesive tape is used in semiconductor processing. 13. The pressure-sensitive adhesive tape according to claim 8 , wherein the pressure-sensitive adhesive tape is used in an LED dicing application.
used during dicing or grinding · CPC title
involving stretching of the auxiliary support post dicing · CPC title
the wafer tape being a laminate of three or more layers, e.g. including additional layers beyond a base layer and an uppermost adhesive layer · CPC title
Wafer tapes, e.g. grinding or dicing support tapes · CPC title
of base or substrate · CPC title
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