Surface poisoning using ALD for high selectivity deposition of high aspect ratio features

Patent metadata

Field	Value
Publication number	US-9460932-B2
Application number	US-201414538292-A
Country	US
Kind code	B2
Filing date	Nov 11, 2014
Priority date	Nov 11, 2013
Publication date	Oct 4, 2016
Grant date	Oct 4, 2016

Abstract

Methods of selectively depositing a feature onto a substrate surface while maintaining substantially straight sidewalls on the feature. A portion of the feature is grown and then covered with a protective film. The protective film is removed from the top of the feature, leaving some of the film on the sides of the feature and the process is repeated to grow a feature of desired thickness.

First claim

What is claimed is:

1. A method of processing a substrate having a first material comprising a metal and a second material comprising a dielectric, the method comprising:
(a) depositing a third material on the first material and second material so that the third material grows selectively on the first material to form a feature having a top and at least one sidewall;
(b) depositing a conformal film of a fourth material on the third material so that the top and the at least one sidewall of the feature have a layer of fourth material thereon;
(c) selectively removing the fourth material from the top of the feature so that at least some of the fourth material remains on the sidewalls of the feature; and
(d) repeating (a) through (c) to grow the feature to a predetermined thickness.

2. The method of claim 1 , further comprising (e) removing the fourth material from the at least one sidewall of the feature.

3. The method of claim 1 , wherein less than about 10 Å of the third material is deposited before depositing the conformal film of the fourth material.

4. The method of claim 1 , wherein selectively removing the fourth material from the top of the feature comprises exposing the fourth material to a directional plasma etch.

5. The method of claim 1 , wherein the feature of predetermined thickness has sidewalls substantially perpendicular to adjacent surface.

6. The method of claim 5 , wherein the sidewall is within about 10° of perpendicular.

7. The method of claim 1 , wherein the fourth material substantially prevents further deposition of third material on the at least one sidewall of the feature.

8. The method of claim 1 , wherein the first material comprises copper metal, the second material comprises a dielectric and the feature is formed on the first material.

9. The method of claim 8 , wherein the third material comprises cobalt metal.

10. The method of claim 9 , wherein the fourth material comprises manganese nitride (MnN).

11. The method of claim 1 , wherein the feature of predetermined thickness has an aspect ratio greater than 3.

12. The method of claim 1 , wherein the feature has a width that varies less than about 10% relative along the thickness of the feature.

13. The method of claim 1 , wherein one or more of the third material and the fourth material is deposited by atomic layer deposition.

14. A method of processing a substrate having a first surface comprising a metal portion and a dielectric portion, the method comprising:
(a) depositing a material on the first surface so that the material grows selectively on the metal portion to form a feature having a top and sidewalls;
(b) depositing a conformal film on the top and sidewalls of the feature;
(c) selectively removing the conformal film from the top of the feature so that at least some of the conformal film remains on the sidewalls of the feature; and
(d) repeating (a) through (c) to grow the feature to a predetermined thickness.

15. The method of claim 14 , further comprising (e) removing the conformal film from the sidewalls of the feature after the feature is grown to the predetermined thickness.

16. The method of claim 14 , wherein less than about 10 Å of the third material is deposited before depositing the conformal film of the fourth material.

17. The method of claim 14 , wherein selectively removing the conformal film from the top of the feature comprises exposing the conformal film to a directional plasma etch.

18. The method of claim 14 , wherein the feature of predetermined thickness has sidewalls substantially perpendicular to an adjacent surface.

19. A method of processing a substrate, the method comprising:
placing the substrate in a processing chamber, the substrate having a surface with a metal portion and a dielectric portion, the metal portion comprising metallic copper; and
growing a feature on the metal portion, the feature including sidewalls and a top, the feature being grown by
(a) depositing a cobalt film on the first surface so that the cobalt film selectively deposits on the metal portion over the dielectric portion forming the feature;
(b) depositing a manganese nitride conformal film on the feature so that the top and sidewalls of the feature have a coating of manganese nitride;
(c) selectively removing the manganese nitride film from the top of the feature so that at least some of the manganese nitride film remains on the sidewalls of the feature; and
(d) repeating (a) through (c) to grow the feature to a predetermined thickness.

Assignees

• Applied Materials Inc

Inventors

• Ma Paul F
• Lu Jiang
• Wei Guodan

Classifications

• H10W20/0552

  by diffusing metallic dopants to react with dielectrics · CPC title

• H10W20/037

  the barrier, adhesion or liner layers being on top of a main fill metal · CPC title

• H10W20/035

  combinations of barrier, adhesion or liner layers, e.g. multi-layered barrier layers · CPC title

• H10P14/432 Primary

  using selective deposition · CPC title

• H01L21/76849

  Electricity · mapped topic