Lens coating/contamination electronic detection

Patent metadata

Field	Value
Publication number	US-9459226-B2
Application number	US-201314024740-A
Country	US
Kind code	B2
Filing date	Sep 12, 2013
Priority date	Sep 12, 2013
Publication date	Oct 4, 2016
Grant date	Oct 4, 2016

Abstract

A contamination detection apparatus may include an optical element having an outer surface and an other surface opposing the outer surface, a first capacitor plate located on the outer surface at an outer periphery of the optical element, and a second capacitor plate located on the outer surface at the outer periphery of the optical element. The second capacitor plate is located adjacent the first capacitor plate and separated from the first capacitor by a gap to form a capacitor, whereby a contaminant is electrically detected based on the contaminant entering the gap and varying a capacitance value corresponding to the capacitor.

First claim

What is claimed is:

1. A contamination detection apparatus, comprising:
an optical element having an outer surface and another surface opposing the outer surface, wherein the outer surface and the another surface are annular;
a first capacitor plate located on the outer surface at an outer annular periphery of the optical element;
a second capacitor plate located on the same outer surface as the first capacitor plate and at the outer annular periphery of the optical element, the second capacitor plate located adjacent the first capacitor plate and separated from the first capacitor plate by a gap to form a capacitor,
wherein a contaminant is electrically detected based on the contaminant entering the gap and varying a capacitance value corresponding to the capacitor;
an electrical detection circuit that electrically detects the varying of the capacitance value corresponding to the capacitor based on a change in reactance of the capacitor; and
a third capacitor plate located on the other surface at the outer annular periphery of the optical element, the third capacitor plate located opposite the second capacitor plate and separated from the second capacitor plate by another gap to form a reference capacitor,
wherein the reference capacitor determines an operational integrity for the electrical detection circuit.

2. The apparatus of claim 1 , wherein the optical element comprises an objective lens.

3. The apparatus of claim 1 , wherein the electrical detection circuit comprises:
a signal generation source that generates an alternating voltage signal having a predetermined frequency and predetermined voltage amplitude, the signal generation source having a first and a second electrical terminal, the first electrical terminal being coupled to the first capacitor plate and the second electrical terminal being coupled to the second capacitor plate; and
an electrical current measurement device coupled between the first electrical terminal and the first capacitor plate, the electrical current measurement device measuring a current value through the capacitor formed between the first and the second capacitor plate,
wherein the varying of the capacitance value corresponding to the capacitor is detected based on a variation in the measured current.

4. The apparatus of claim 1 , wherein the first capacitor plate comprises a first substantially circular elongate plate having a first height value and a first thickness value, the first height value and the first thickness value having a first aspect ratio not exceeding about two.

5. The apparatus of claim 4 , wherein the second capacitor plate comprises a second substantially circular elongate plate having a second height value and a second thickness value, the second height value and the second thickness value having a second aspect ratio not exceeding about two.

6. The apparatus of claim 1 , wherein the gap includes an air gap, the air gap having a distance value in the range of about 0.5-2.0 millimeters.

7. The apparatus of claim 1 , wherein the third capacitor plate comprises a third substantially circular elongate plate having a third height value and a third thickness value, the third height value and the third thickness value having a third aspect ratio not exceeding about two.

8. The apparatus of claim 1 , wherein the other gap has a distance value in the range of about 1.0-3.0 millimeters.

9. The apparatus of claim 1 , wherein the other gap comprises a material used to form the optical element.

10. The apparatus of claim 9 , wherein the material is a dielectric optical material.

11. The apparatus of claim 1 , wherein
the first capacitor plate comprises a first substantially circular elongate plate having a first height value and a first thickness value, the first height value and the first thickness value having a first aspect ratio not exceeding about two, and wherein
the second capacitor plate comprises a second substantially circular elongate plate having a second height value and a second thickness value, the second height value and the second thickness value having a second aspect ratio not exceeding about two, and wherein
the third capacitor plate comprises a third substantially circular elongate plate having a third height value and a third thickness value, the third height value and the third thickness value having a third aspect ratio not exceeding about two.

12. A method of determining contamination over an outer surface of a final stage optical element of an optical system, comprising:
applying an alternating signal having a predetermined voltage amplitude to a first capacitor plate located on the outer surface at an outer periphery of the optical element;
applying a ground signal to a second capacitor plate located on the outer surface at the outer periphery of the optical element, the second capacitor plate located adjacent the first capacitor plate and separated from the first capacitor by a gap to form a capacitor;
measuring an electrical current value associated with the capacitor based on the applied alternating signal;
calculating a capacitive reactance value for the capacitor based on the measured current value and the applied predetermined voltage amplitude; and
determining a contaminant on the outer surface of the optical element based on the calculated capacitive reactance, wherein the capacitive reactance varies based on the contaminant entering the gap.

13. The method of claim 12 , wherein the contaminant entering the gap decrease capacitive reactance by increasing a capacitance value of the capacitor by increasing the relative permittivity (cr) of the capacitor by a factor of about 2 to about 100.

14. The method of claim 12 , further comprising:
applying the alternating signal having the predetermined voltage amplitude to a third capacitor plate located on the inner surface at the outer periphery of the optical element, the third capacitor plate located adjacent the second capacitor plate and separated from the second capacitor plate by another gap to form a reference capacitor;
measuring another electrical current value associated with the reference capacitor based on the applied alternating signal;
calculating another capacitive reactance value for the reference capacitor based on the other measured current value and the applied predetermined voltage amplitude; and
determining an electrical operation integrity for an electrical circuit used in the applying of the alternating signal and the measuring of the other electrical current value, wherein the determined electrical operation integrity is based on the calculated other capacitive reactance value.

15. The method of claim 12 , wherein the alternating signal comprises a frequency of about 1-100 MHz.

16. A computer program product for determining contamination over an outer surface of a final stage optical element of an optical system, the computer program product comprising a computer readable storage medium readable by a processing circuit and storing instructions for execution by the processing circuit for performing a method comprising:
measuring an alternating signal having a voltage amplitude that is applied between a first capacitor plate located on the outer surface at an outer annular periphery of the optical element and a second capacitor plate located on the same outer surface as the first capacitor plate and at the outer annular periphery of the optical element, the second capacitor plate located adjacent the first capacitor plate and separated from the first capacitor by a gap to form a capacitor;
measuring an electrical current value associat

Assignees

• IBM
• Globalfoundries Inc

Inventors

• Strocchia-Rivera Carlos

Classifications

• G01N27/24 Primary

  Investigating the presence of flaws · CPC title

• G01N27/20

  Investigating the presence of flaws · CPC title

• G01N27/22

  by investigating capacitance · CPC title

• G01N21/55

  Specular reflectivity · CPC title

• G01N2021/155

  Monitoring cleanness of window, lens, or other parts · CPC title