Transparent reflector plate for rapid thermal processing chamber

Patent metadata

Field	Value
Publication number	US-9449858-B2
Application number	US-201113184895-A
Country	US
Kind code	B2
Filing date	Jul 18, 2011
Priority date	Aug 9, 2010
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

The present invention generally relates to methods and apparatus for processing substrates. Embodiments of the invention include apparatuses for processing a substrate comprising a ceramic reflector plate, which may be optically transparent. The reflector plate may include a reflective coating and be part of a reflector plate assembly in which the reflector plate is assembled to a baseplate.

First claim

What is claimed is:

1. An apparatus for processing a substrate having a front side and a back side, the apparatus comprising:
a processing chamber having a process area defined on one side by a window adjacent a radiant heat source located outside the process area;
a reflector plate assembly comprising a baseplate and a reflector plate, the baseplate disposed opposite the radiant heat source, the reflector plate disposed between the baseplate and the radiant heat source and spaced a distance from the baseplate, the reflector plate comprising a body having a first surface closest to the radiant heat source and a second surface closer to the baseplate, the body made from an optically transparent ceramic material and having a reflective coating comprising a plurality of dielectric layers on the second surface, the reflective coating including a plurality of pyrometer apertures extending therethrough, the plurality of pyrometer apertures in the reflective coating do not extend through the first surface of the body;
the optically transparent ceramic material including a dopant to increase the amount of heat absorbed by the reflector plate; and
at least one pyrometer probe positioned adjacent at least one of the pyrometer apertures in the reflective coating.

2. The apparatus of claim 1 , wherein the optically transparent ceramic material is selected from alumina, silicon carbide, quartz, and sapphire.

3. The apparatus of claim 1 , wherein the apertures extend only through the reflective coating.

4. The apparatus of claim 1 , wherein the reflector plate and baseplate are spaced apart by less than about 5 mm.

5. The apparatus of claim 1 , wherein the reflector plate assembly includes standoffs to separate the reflector plate and baseplate in a spaced apart relationship.

6. The apparatus of claim 1 , wherein the dopant is selected from rare earth materials, OH and combinations thereof.

7. The apparatus of claim 1 , wherein the baseplate includes a plurality of openings aligned with the apertures in the reflector plate.

8. A reflector plate assembly apparatus for use in a rapid thermal processing chamber comprising:
a baseplate having a plurality of openings therethrough to accommodate a pyrometer probe; and
a reflector plate comprising a body made from an optically transparent ceramic material, the optically transparent ceramic material including a dopant to increase the amount of heat absorbed by the reflector plate, the body having a first surface and a second surface facing the baseplate, the second surface having a reflective coating comprising a plurality of dielectric layers thereon, and a plurality of pyrometer apertures extending through at least the reflective coating, each pyrometer aperture aligned with an opening in the baseplate,
wherein the pyrometer apertures do not extend through the first surface of the body and the reflective coating has an operating temperature up to about 400° C. and resists peeling in a rapid thermal processing chamber heated at a rate greater than or equal to about 50° C./sec.

9. The apparatus of claim 8 , wherein the baseplate includes a plurality of standoffs to maintain the reflector plate and baseplate in a spaced apart relationship.

10. The apparatus of claim 8 , wherein the ceramic material is selected from alumina, silicon carbide, quartz, and sapphire.

11. The apparatus of claim 8 , wherein the dopant is selected from rare earth materials, OH, and combinations thereof.

Assignees

• Koelmel Blake R
• Hunter Aaron M
• Lerner Alexander N
• Applied Materials Inc

Inventors

• Koelmel Blake R
• Hunter Aaron M
• Lerner Alexander N

Classifications

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• F27D2019/0003

  Monitoring the temperature or a characteristic of the charge and using it as a controlling value · CPC title

• F27D11/02

  Ohmic resistance heating · CPC title