Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber
US-9478455-B1 · Oct 25, 2016 · US
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Lerner Alexander N patents
Lerner Alexander N holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Mar 24, 2016 |
| Latest publication | Oct 25, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2016 | 4 |
| Year | Patents |
|---|---|
| 2016 | 4 |
Recent patents
Latest publications where this party is an assignee.
Transparent reflector plate for rapid thermal processing chamber
US-9449858-B2 · Sep 20, 2016 · US
Transfer arm for film frame substrate handling during plasma singulation of wafers
US-2016133519-A1 · May 12, 2016 · US
Proximity contact cover ring for plasma dicing
US-2016086852-A1 · Mar 24, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber
US-9478455-B1 · Oct 25, 2016 · US
Transparent reflector plate for rapid thermal processing chamber
US-9449858-B2 · Sep 20, 2016 · US
Transfer arm for film frame substrate handling during plasma singulation of wafers
US-2016133519-A1 · May 12, 2016 · US
Proximity contact cover ring for plasma dicing
US-2016086852-A1 · Mar 24, 2016 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 4 |
| Operations & Transport | 1 |
| Mechanical Engineering | 1 |