Systems and methods for forming semiconductor cutting/trimming blades
US-11565371-B2 · Jan 31, 2023 · US
US9446499B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9446499-B2 |
| Application number | US-201514657392-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 13, 2015 |
| Priority date | Mar 17, 2014 |
| Publication date | Sep 20, 2016 |
| Grant date | Sep 20, 2016 |
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Official abstract text for this publication.
A truing device is supported so as to be elastically movable in the Z-axis direction, which is parallel to a grinding wheel rotational axis, and elastically movable in the X-axis direction in which a grinding wheel cuts into the truing device, and includes a movement restriction device that controls prohibition and permission of elastic movement. The method includes: causing a surface of the grinding wheel to contact the truing device in the X-axis direction; and correcting a shape of the grinding wheel when the grinding wheel cuts into the truing device until the amount of elastic movement of the truing device in the X-axis direction reaches a first predetermined amount, by controlling the movement restriction device to prohibit elastic movement of the truing device, and thereafter causing the grinding wheel to further cut into the truing device in the X-axis direction by a second predetermined amount.
Opening claim text (preview).
What is claimed is: 1. A grinding wheel truing method comprising: (a) by a control device, causing a surface of a grinding wheel to contact a truing device by moving the grinding wheel with respect to the truing device in a Z-axis direction to cause the truing device and the grinding wheel to face each other in a X-axis direction, and then controlling a movement restriction device to a permitted state so as to relatively move the grinding wheel with respect to the truing device in the X-axis direction; and (b) by the control device, correcting a shape of the grinding wheel, when the grinding wheel and the truing device contact each other, or when the grinding wheel relatively cuts into the truing device in the X-axis direction until an amount of elastic movement of the truing device in a X-axis direction reaches a first predetermined amount after the grinding wheel and the truing device contact each other, by controlling the movement restriction device to a prohibited state so as to prohibit elastic movement of the truing device in at least the X-axis direction, and thereafter causing the grinding wheel to further relatively cut into the truing device in the X-axis direction by a second predetermined amount, wherein, the grinding wheel truing method is performed using: the grinding wheel having a generally cylindrical shape and driven to rotate about a grinding wheel rotational axis; the truing device supported so as to be rotatable about a truer rotational axis that is parallel to the Z-axis direction that is parallel to the grinding wheel rotational axis, or supported so as to be driven to rotate about the truer rotational axis, to execute truing of the grinding wheel; and the control device that relatively moves the grinding wheel with respect to the truing device in the X-axis direction and the Z-axis direction, the X-axis direction being a direction that is orthogonal to the grinding wheel rotational axis and in which the grinding wheel cuts into the truing device, the truing device being elastically supported in the Z-axis direction to be elastically movable in the Z-axis direction, being elastically supported in the X-axis direction to be elastically movable in the X-axis direction, and including a movement restriction device that controls prohibition and permission of elastic movement in at least the X-axis direction. 2. The grinding wheel truing method according to claim 1 , wherein: after step (a) and before step (b) the control device determines on the basis of a predetermined determination condition whether current truing is based on a shape correction timing for correcting the shape of the grinding wheel or based on a surface roughness correction timing for correcting a surface roughness of the grinding wheel; in the case where it is determined that the current truing is based on the shape correction timing, step (b) is executed; and in the case where it is determined that the current truing is based on the surface roughness correction timing, the surface roughness of the grinding wheel is corrected by causing the grinding wheel to relatively cut into the truing device in the X-axis direction until the amount of elastic movement of the truing device in the X-axis direction after contact between the grinding wheel and the truing device reaches a third predetermined amount that is larger than the first predetermined amount. 3. A grinding machine that execute truing of a grinding wheel by the grinding wheel truing method according to claim 1 , comprising: an X-axis direction movement device that relatively moves the grinding wheel with respect to the truing device in the X-axis direction; an X-axis relative movement amount detector capable of detecting an amount of relative movement of the grinding wheel with respect to the truing device in the X-axis direction caused by the X-axis direction movement device; a Z-axis direction movement device that relatively moves the grinding wheel with respect to the truing device in the Z-axis direction; a Z-axis relative movement amount detector capable of detecting an amount of relative movement of the grinding wheel with respect to the truing device in the Z-axis direction caused by the Z-axis direction movement device; an X-axis elastic movement amount detector capable of detecting an amount of elastic movement of the truing device in the X-axis direction; the movement restriction device that controls prohibition and permission of elastic movement of the truing device in at least the X-axis direction; and the control device that receives detection signals from the X-axis relative movement amount detector, the Z-axis relative movement amount detector, and the X-axis elastic movement amount detector to control the X-axis direction movement device, the Z-axis direction movement device, and the movement restriction device. 4. A grinding machine that execute truing of a grinding wheel by the grinding wheel truing method according to claim 2 , comprising: an X-axis direction movement device that relatively moves the grinding wheel with respect to the truing device in the X-axis direction; an X-axis relative movement amount detector capable of detecting an amount of relative movement of the grinding wheel with respect to the truing device in the X-axis direction caused by the X-axis direction movement device; a Z-axis direction movement device that relatively moves the grinding wheel with respect to the truing device in the Z-axis direction; a Z-axis relative movement amount detector capable of detecting an amount of relative movement of the grinding wheel with respect to the truing device in the Z-axis direction caused by the Z-axis direction movement device; an X-axis elastic movement amount detector capable of detecting an amount of elastic movement of the truing device in the X-axis direction; the movement restriction device that controls prohibition and permission of elastic movement of the truing device in at least the X-axis direction; and the control device that receives detection signals from the X-axis relative movement amount detector, the Z-axis relative movement amount detector, and the X-axis elastic movement amount detector to control the X-axis direction movement device, the Z-axis direction movement device, and the movement restriction device.
of cylindrical or conical surfaces on abrasive tools or wheels (B24B53/017 takes precedence) · CPC title
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