Vacuum processing apparatus

Patent metadata

Field	Value
Publication number	US-9443749-B2
Application number	US-201213980474-A
Country	US
Kind code	B2
Filing date	Jan 18, 2012
Priority date	Jan 20, 2011
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

In this vacuum processing apparatus, four process modules and four load-rock modules are arranged in clusters around a two-stage conveyance vacuum chamber. In the apparatus, the entirety of the second stage of the vacuum conveyance chamber is a third vacuum conveyance area and the third vacuum conveyance area extends from the second stage to the first stage through an aperture to enter between first and second vacuum conveyance areas. A third vacuum conveyance robot has: left and right-side conveyance units, which can move straight in the depth direction in the second stage of the third vacuum conveyance area; and left and right-side conveyance units, which can move straight in the vertical direction, i.e. can move up and down, in the aperture of the vacuum conveyance area.

First claim

What is claimed is:

1. A vacuum processing apparatus comprising:
a vacuum conveyance chamber of which the interior is partitioned into an upper section and a lower section by a horizontal partition plate provided with an aperture at a central portion thereof;
first and second vacuum conveyance areas formed in the lower section within the vacuum conveyance chamber to be separated from each other in a horizontal direction;
a first set of process modules and a first set of load-lock modules arranged around the vacuum conveyance chamber adjacent to the first vacuum conveyance area;
a second set of process modules arranged around the vacuum conveyance chamber adjacent to the second vacuum conveyance area;
a first vacuum conveyance mechanism configured to access the first set of process modules and the first set of load-lock modules to give and take a substrate with each module of an access place and convey the substrate within the first vacuum conveyance area;
a second vacuum conveyance mechanism configured to access the second set of process modules to give and take a substrate with each module of an access place and convey the substrate within the second vacuum conveyance area;
a third vacuum conveyance area provided in the upper section within the vacuum conveyance chamber;
a second set of load-lock modules provided adjacent to the upper section within the vacuum conveyance chamber and arranged on a floor higher than the first set of load-lock modules;
and
a third vacuum conveyance mechanism configured to access the second set of load-lock modules to give and take a substrate with each module of an access place and to give and take the substrate with the second vacuum conveyance mechanism at a first transfer position formed at the aperture of the central portion in the third vacuum conveyance area so as to convey the substrate in the third vacuum conveyance area,
wherein the first vacuum conveyance mechanism includes a first pair of conveyance arms and each arm of the first pair of conveyance arms is configured to carry a substrate, so that the first pair of arms provide two substrate carrying locations and the second vacuum conveyance mechanism includes a second pair of conveyance arms and each arm of the second pair of conveyance arms is configured to carry a substrate so that the second pair of arms provide two substrate carrying locations, and
the first and second pairs of conveyance arms are each configured to continuously carry-out a processed substrate and carry-in a non-processed substrate.

2. The vacuum processing apparatus of claim 1 , wherein the second set of load-lock modules are arranged above the first set of load-lock modules.

3. The vacuum processing apparatus of claim 1 , wherein the second set of load-lock modules are arranged above the first vacuum conveyance area.

4. The vacuum processing apparatus of claim 1 , wherein the second set of load-lock modules are arranged above the entirety of the first set load-lock modules and the first vacuum conveyance area.

5. The vacuum processing apparatus of claim 1 , wherein the third vacuum conveyance mechanism includes a horizontal conveyance unit which is movable horizontally and a vertical conveyance unit which is movable up and down, the horizontal conveyance unit and the vertical conveyance unit being capable of giving and taking a substrate at a second transfer position formed above or below the first transfer position within the third vacuum conveyance area,
the horizontal conveyance unit conveys a substrate between the second set of load-lock modules and the second transfer position, and
the vertical conveyance unit conveys a substrate between the transfer position and the second transfer position.

6. The vacuum processing apparatus of claim 5 , wherein the horizontal conveyance unit includes a first rectilinear mechanism configured to convey a substrate back and forth along a horizontal direction.

7. The vacuum processing apparatus of claim 5 , wherein the horizontal conveyance unit includes a conveyance arm configured to hold or support substrates on one substrate basis.

8. The vacuum processing apparatus of claim 5 , wherein the vertical conveyance unit includes a second rectilinear mechanism configured to convey a substrate only in a vertical direction.

9. The vacuum processing apparatus of claim 5 , wherein the vertical conveyance unit includes a pair of buffers configured to be capable of placing or supporting two substrates simultaneously.

10. The vacuum processing apparatus of claim 5 , wherein the second set of load-lock modules include a pair of load-lock modules arranged laterally in parallel to each other, and
the third vacuum conveyance mechanism includes one pair of horizontal conveyance units provided laterally in parallel to each other to correspond to the one pair of load lock modules arranged laterally in parallel to each other, respectively, and configured to be operated independently from each other, and one pair of vertical conveyance units provided laterally in parallel to each other and configured to be operated independently from each other.

11. The vacuum processing apparatus of claim 1 , further comprising:
a first load port provided at a predetermined position in an atmosphere space opposite to the first and second sets of load-lock modules so as to load or unload a cassette configured to accommodate a plurality of substrates in parallel to each other at a regular interval such that the plurality of substrates may enter into or exit from the cassette;
a first atmosphere conveyance mechanism configured to convey a substrate between a first cassette laid on the first load port and any one of the load-lock modules; and
a second atmosphere conveyance mechanism configured to convey a substrate between the first cassette on the first load port and any one of other load-lock modules,
wherein the first and second atmosphere conveyance mechanisms alternately discharge/charge substrates from/into the first cassette one by one.

12. The vacuum processing apparatus of claim 11 , wherein the first atmosphere conveyance mechanism conveys a substrate between the first cassette and the first set of load-lock modules, and
the second atmosphere conveyance mechanism conveys a substrate between the first cassette and the second set of load-lock modules.

13. The vacuum processing apparatus of claim 12 , wherein, while the first atmosphere conveyance mechanism is accessing the first cassette so as to unload or load a substrate, the second atmosphere conveyance mechanism accesses the second set of load-lock modules so as to unload or load a substrate; and
while the second atmosphere conveyance mechanism is accessing the first cassette so as to unload or load a substrate, the first atmosphere conveyance mechanism accesses the first set of load-lock modules so as to unload or unload a substrate.

14. The vacuum processing apparatus of claim 11 , further comprising;
a second load port provided adjacent to the first load port within the atmosphere space,
wherein the first and second atmosphere conveyance mechanisms also alternately unload or load substrates in relation to a second cassette laid on the second load port.

15. The vacuum processing apparatus of claim 11 , wherein each of the first and second atmospheric conveyance mechanisms includes an articulated robot which is not provided with a horizontal slide shaft.

16. The vacuum processing apparatus of claim 1 , wherein all the process modules belonging to the first set and all the process modules belonging to the second set repeatedly perform the same sin

Assignees

• Wakabayashi Shinji
• Kobayashi Sensho
• Tokyo Electron Ltd

Inventors

• Wakabayashi Shinji
• Kobayashi Sensho

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0464 Primary

  characterised by the construction of the transfer chamber · CPC title

• H10P72/32 Primary

  between different workstations · CPC title

• B25J11/0095

  Manipulators transporting wafers · CPC title

• H01L21/67196

  Electricity · mapped topic