Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods

Patent metadata

Field	Value
Publication number	US-9441792-B2
Application number	US-201414498449-A
Country	US
Kind code	B2
Filing date	Sep 26, 2014
Priority date	Sep 30, 2013
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

Transfer chamber gas purge apparatus are disclosed. The transfer chamber gas purge apparatus has a transfer chamber adapted to contain at least a portion of a transfer robot, the transfer chamber including side walls, a chamber lid, and a chamber floor, wherein the chamber lid has a plurality of distributed chamber inlets. The plurality of distributed chamber inlets may include diffusing elements. Laminar purge gas flow may be provided above the substrate. Systems and methods including a plurality of distributed chamber inlets are disclosed, as are numerous other aspects.

First claim

The invention claimed is:

1. A transfer chamber gas purge apparatus, comprising:
a transfer chamber adapted to contain at least a portion of a transfer robot, the transfer chamber at least partially formed by side walls, a chamber lid, and a chamber floor, the chamber lid having a plurality of distributed chamber inlets including primary chamber inlets, at least some of which are positioned above a transfer path of a substrate, and secondary chamber inlets, at least some of which are arranged between the primary chamber inlets.

2. A transfer chamber gas purge apparatus, comprising:
a transfer chamber adapted to contain at least a portion of a transfer robot, the transfer chamber at least partially formed by side walls, a chamber lid, and a chamber floor, the chamber lid having a plurality of distributed chamber inlets
wherein the plurality of distributed chamber inlets comprise primary chamber inlets and secondary chamber inlets, wherein the primary chamber inlets and secondary chamber inlets are independently controllable.

3. The transfer chamber gas purge apparatus of claim 2 , wherein the primary chamber inlets and the secondary chamber inlets are coupled to a flow control assembly.

4. The transfer chamber gas purge apparatus of claim 1 , wherein the plurality of distributed chamber inlets comprises at least four primary chamber inlets.

5. The transfer chamber gas purge apparatus of claim 1 , wherein the plurality of distributed chamber inlets comprises at least four secondary chamber inlets.

6. The transfer chamber gas purge apparatus of claim 1 , comprising a plurality of view windows formed in the chamber lid.

7. The transfer chamber purge gas apparatus of claim 1 , wherein at least some of the plurality of distributed chamber inlets comprise a diffusing element.

8. The transfer chamber purge gas apparatus of claim 7 , wherein the diffusing element comprises a porous member.

9. The transfer chamber purge gas apparatus of claim 7 , wherein the diffusing element comprises a porous metal disc.

10. A transfer chamber purge gas apparatus, comprising:
a transfer chamber adapted to contain at least a portion of a transfer robot, the transfer chamber at least partially formed by side walls, a chamber lid, and a chamber floor, the chamber lid having a plurality of distributed chamber inlets
wherein the plurality of distributed chamber inlets comprise primary chamber inlets and secondary chamber inlets having different inlet flow areas at their respective entrances into the transfer chamber.

11. The transfer chamber purge gas apparatus of claim 1 , comprising a plurality of distributed chamber outlets provided in the chamber floor.

12. The transfer chamber purge gas apparatus of claim 1 , comprising a plurality of distributed chamber outlets provided in the chamber floor, wherein at least some of the plurality of distributed chamber outlets are vertically aligned with at least some of the plurality of distributed chamber inlets.

13. An electronic device processing system, comprising:
a transfer chamber at least partially formed by a mainframe housing having side walls, a chamber lid, and a chamber floor;
a plurality of distributed chamber inlets in the chamber lid; and
a plurality of distributed chamber outlets in the chamber floor.

14. The electronic device processing system of claim 13 , wherein the transfer chamber contains a robot adapted to transfer substrates to and from at least two chambers coupled to the mainframe housing.

15. A method of purging a transfer chamber, comprising:
providing a transfer chamber at least partially formed by a chamber lid, side walls, and a chamber floor, the transfer chamber containing at least a portion of a robot adapted to transport a substrate to and from chambers accessed from the transfer chamber; and
purging from the transfer chamber by inflow of a purge gas through a plurality of distributed inlets in the chamber lid wherein the purging from the transfer chamber further comprises providing a substantially laminar flow of the purge gas above the substrate.

16. The method of claim 15 , wherein the purging further comprises exhausting the purge gas through a plurality of distributed chamber outlets in the floor.

17. The method of claim 15 , wherein the purging from the transfer chamber further comprises inflow of the purge gas through a plurality of diffusing elements.

18. The method of claim 15 , comprising:
providing the plurality of distributed chamber inlets with primary chamber inlets and secondary chamber inlets; and
independently controlling flow of the purge gas to the primary chamber inlets and the secondary chamber inlets.

Assignees

• Applied Materials Inc

Inventors

• Ng Edward
• Englhardt Eric A
• Morey Travis
• Majumdar Ayan
• Hongkham Steve S

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/0464

  characterised by the construction of the transfer chamber · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• F17D1/04 Primary

  for distribution of gas · CPC title

• C23C16/54

  Apparatus specially adapted for continuous coating · CPC title