Thin film deposition apparatus and method of forming thin film using the same

Patent metadata

Field	Value
Publication number	US-9435020-B2
Application number	US-201514740201-A
Country	US
Kind code	B2
Filing date	Jun 15, 2015
Priority date	Apr 15, 2013
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.

First claim

What is claimed is:

1. A thin film deposition apparatus comprising:
a chamber;
a mask stage in the chamber and configured to support a mask;
a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage and comprising a laser radiating part configured to radiate a laser beam at the mask stage or the mask; and
a rail in the chamber and configured to support the movement of the jig.

2. The thin film deposition apparatus of claim 1 , wherein the rail comprises a pair of rails that are parallel to each other and to edges of the mask stage.

3. The thin film deposition apparatus of claim 2 , wherein
the jig is connected to the pair of rails by a connecting part, and
the connecting part comprises a driving part for moving the jig.

4. A thin film deposition apparatus comprising:
a chamber;
a mask stage in the chamber and configured to support a mask;
a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and
a rail in the chamber and configured to support the movement of the jig,
wherein the jig is configured to radiate one or more laser beams in a downward direction from the jig to obtain data regarding a structure under the jig.

5. The thin film deposition apparatus of claim 4 , further comprising a controller configured to receive scanning data regarding the structure from the jig.

6. The thin film deposition apparatus of claim 5 , wherein
the structure is the mask stage,
the jig is further configured to radiate the laser beams onto an upper surface of the mask stage, and
the controller is further configured to determine flatness and tilting of the mask stage from the scanning data.

7. The thin film deposition apparatus of claim 5 , wherein
the mask is mounted on the mask stage,
the structure is the mask,
the jig is further configured to radiate the laser beams onto a surface of the mask, and
the controller is further configured to determine flatness of the mask from the scanning data.

8. The thin film deposition apparatus of claim 5 , further comprising a camera part proximate to a side of the mask stage, wherein the jig is further configured to move over the camera part.

9. The thin film deposition apparatus of claim 8 , wherein
the structure is the camera part, and
the jig is further configured to radiate the laser beams onto the camera part to obtain the scanning data.

10. The thin film deposition apparatus of claim 9 , wherein the controller is further configured to determine a change in position of the camera part from the scanning data.

11. A thin film deposition apparatus comprising:
a chamber;
a mask stage positioned within the chamber and configured to support a mask;
a camera part proximate to a side of the mask stage; and
a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part,
wherein the jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.

12. The thin film deposition apparatus of claim 11 , further comprising a controller configured to receive the first and second scanning data.

13. The thin film deposition apparatus of claim 12 , wherein the controller is further configured to determine flatness or tilting of the mask stage from the first scanning data.

14. The thin film deposition apparatus of claim 13 , wherein the controller is further configured to determine a change in position of the camera part by comparing the first and second scanning data with reference position data.

15. The thin film deposition apparatus of claim 11 , further comprising a pair of rails parallel to sides of the mask stage, wherein the jig is configured to move along the pair of rails.

16. The thin film deposition apparatus of claim 15 , wherein
the jig is connected to the pair of rails by a connecting part, and
the connecting part comprises a driving part for moving the jig.

Assignees

• Samsung Display Co Ltd

Inventors

• Jeong Sang-Yong
• Lee Myung-Ki
• Kim Sang-Youn
• Jeon You-Sung

Classifications

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• C23C14/042 Primary

  using masks · CPC title

• H01L51/0011

  Electricity · mapped topic

• H01L51/56

  Electricity · mapped topic

• C23C14/54

  Controlling or regulating the coating process · CPC title