Thin film deposition apparatus and method of forming thin film using the same
US-9435020-B2 · Sep 6, 2016 · US
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Patent family 51687069
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51687069 |
| Family type | — |
| Earliest priority | Apr 15, 2013 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US9435020B2 — Thin film deposition apparatus and method of forming thin film using the same |
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US9435020B2 — Thin film deposition apparatus and method of forming thin film using the same (published Sep 6, 2016)
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