Semiconductor processing boat design with pressure sensor

Patent metadata

Field	Value
Publication number	US-9427818-B2
Application number	US-201414159106-A
Country	US
Kind code	B2
Filing date	Jan 20, 2014
Priority date	Jan 20, 2014
Publication date	Aug 30, 2016
Grant date	Aug 30, 2016

Abstract

Presented herein is a device comprising a device processing boat comprising a base at least one unit retainer disposed in the base. The device further comprises a cover having at least one recess configured to accept and retain at least one unit, the at least one recess aligned over, and configured to hold the at least one unit over, at least a portion of the at least one unit retainer. The cover is retained to the device processing boat by the at least one unit retainer. At least one pressure sensor having at least one sensel is disposed in the base and having the sensel configured to sense a clamping force applied by the cover to the at least one unit.

First claim

What is claimed is:

1. A device comprising:
a device processing boat comprising:
a base; and
at least one unit retainer disposed in the base; and

a cover having at least one recess configured to accept and retain at least one unit, the at least one recess aligned over, and configured to hold the at least one unit directly over at least a first portion of the at least one unit retainer;
wherein the cover is retained over the device processing boat by a second portion of the at least one unit retainer having a surface substantially level with a surface of the first portion of the at least one unit retainer.

2. The device of claim 1 , wherein the at least one unit retainer is a magnet, and wherein the cover has at least one cover portion formed from a material that is attracted to a magnetic field, the at least one cover portion corresponding to the second portion of the at least one unit retainer.

3. The device of claim 2 , wherein the device processing boat further comprises a plurality of border retainers disposed in the base, and wherein the cover is configured to align over and be retained by the plurality of border retainers.

4. The device of claim 1 , wherein the at least one recess comprises two or more recesses and wherein the at least one unit retainer extends under at least two of the two or more recesses.

5. The device of claim 4 , wherein the at least one unit retainer comprises two or more unit retainers, and wherein at least two of the two or more unit retainers extend under a same one of the two or more recesses.

6. The device of claim 1 , the cover having an opening over each of the recesses.

7. The device of claim 1 , the device processing boat further comprising at least one pressure sensor having at least one sensel, the at least one pressure sensor disposed in the base and having the sensel configured to sense a clamping force applied by the cover to the at least one unit.

8. The device of claim 7 , wherein the at least one pressure sensor comprises a plurality of sensels, wherein the at least one unit comprises a plurality of units, and wherein each of the plurality of sensels is configured to sense the clamping force applied by the cover to a respective one of the plurality of units.

9. A device comprising:
a processing boat comprising:
a substrate;
at least one first retainer disposed in the substrate, at least a portion of the at least one first retainer directly underlying a unit area; and
at least one second retainer disposed in an outer region of the substrate; and

a cover comprising at least one recess in a bottom surface of the cover, the at least one recess configured to retain at least one unit in the unit area, wherein the cover is retained over the processing boat by an additional portion of the at least one first retainer outside the unit area and substantially level with a the portion of the at least one first retainer directly underlying the unit area.

10. The device of claim 9 , wherein the cover is further retained to the processing boat by the at least one second retainer.

11. The device of claim 9 , wherein the at least one first retainer comprises a magnet, and wherein the cover has at least one cover portion formed from a material that is attracted to a magnetic field, the at least one cover portion corresponding to the additional portion of the at least one first retainer.

12. The device of claim 11 , wherein the magnet of the at least one first retainer is configured to exert a clamping force on the at least one first retainer between about 450 grams of force and about 1000 grams of force.

13. The device of claim 9 , wherein the at least one recess comprises two or more recesses and wherein the at least one first retainer extends under at least two of the two or more recesses.

14. The device of claim 13 , wherein the at least one first retainer comprises two or more first retainers, and wherein at least two of the two or more first retainers extend under a same one of the two or more recesses.

15. The device of claim 9 , wherein the cover further comprises an opening over the at least one recess and extending from a top surface of the cover to the at least one recess.

16. A device comprising:
a processing boat comprising:
a base;
a plurality of first retainers disposed in an inner region of the base, at least a portion of at least one of the plurality of first retainers underlying a unit area; and
a plurality of second retainers disposed in an outer region of the base;

at least one unit disposed over the processing boat, the at least one unit disposed in the unit area;
a cover comprising at least one recess in a bottom surface of the cover, the at least one recess configured to retain the at least one unit in the unit area;
an opening formed over the at least one recess, the opening extending from a top surface of the cover to the at least one recess;
at least one connector formed in the opening over the at least one unit; and
a package formed over the at least one connector.

17. The device of claim 16 , wherein the cover is held to the processing boat by the plurality of first retainers and the plurality of second retainers.

18. The device of claim 16 , wherein the plurality of first retainers comprises a magnet, and wherein the cover has at least one cover portion formed from a material that is attracted to a magnetic field.

19. The device of claim 18 , wherein the magnet of the plurality of first retainers is configured to exert a clamping force on the plurality of first retainers between about 450 grams of force and about 1000 grams of force.

20. The device of claim 16 , wherein at least a portion of each of at least two of the plurality of first retainers underlies the at least one unit.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Ang Ai-Tee
• Lin Hsiu-Jen
• Lin Wei-Hung
• Cheng Ming-Da
• Liu Chung-Shi

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/13 Primary

  Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements · CPC title

• B23K1/0016 Primary

  Soldering of electronic components · CPC title

• B23K3/087 Primary

  Soldering or brazing jigs, fixtures or clamping means · CPC title