Substrate correction device, substrate lamination device, substrate processing system, substrate correction method, substrate processing method, and semiconductor device manufacturing method
US-2024404859-A1 · Dec 5, 2024 · US
US9401292B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9401292-B2 |
| Application number | US-201314113818-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 25, 2013 |
| Priority date | May 21, 2013 |
| Publication date | Jul 26, 2016 |
| Grant date | Jul 26, 2016 |
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Official abstract text for this publication.
A transporting device for transporting substrate of liquid crystal display and using method thereof are provided. The transporting device comprises a fixing arm, at least two forks mounted on the fixing arm, laser emitting devices respectively mounted on the forks that are used to carry two ends of the substrate, laser sensors mounted on the fixing arm and corresponding to the laser emitting devices, a processor mounted on the fixing arm and connected to the laser sensors, and air damping devices mounted below the forks that are used to carry two ends of the substrate. The droop amount and the vibration of the fork can be measured when the transporting device is carrying a substrate, and it can be determined whether the droop amount and the vibration are abnormal. If they are abnormal, the laser emitting device will be started up to alleviate the vibration of the fork.
Opening claim text (preview).
The invention claimed is: 1. A transporting device for transporting a substrate of a liquid crystal display, comprising a fixing arm, at least two forks mounted on the fixing arm and configured to carry the substrate, two laser emitting devices which are respectively mounted on two outside most forks of the at least two forks, two laser sensors which are mounted on the fixing arm and corresponding to the laser emitting devices, a processor which is mounted on the fixing arm and connected to the laser sensors, and two air damping devices which are mounted below the two outside most forks respectively; wherein each of the air damping devices is mounted on one end of a corresponding fork, away from the fixing arm; and each of the air damping devices comprises an air source, an electromagnetic valve which is connected to the air source and controlled to operate by the processor, and an injector head which is connected to the electromagnetic valve; the injector head is mounted on one end of the corresponding fork, away from the fixing arm; wherein, when the at least two forks carry the substrate, the laser sensors receive lasers emitted from the laser emitting devices, sense displacement of the at least two forks via the lasers and generate a corresponding sensing signal; the processor processes the sensing signal generated by the laser sensors, attains a first amplitude of the at least two forks when they carry the substrate, and compares the first amplitude with a first preset threshold; the processor will control the air damping devices to work to alleviate vibration of the at least two forks if the first amplitude is larger than the first threshold; wherein the processor is defined to start up the air damping device only if it has detected that the at least two forks are moving downward. 2. The transporting device according to claim 1 , wherein each of the laser emitting devices is mounted on the outer side of one end of a corresponding fork, away from the fixing arm. 3. The transporting device according to claim 1 , wherein the laser sensor is a CCD laser displacement sensor, and the number of the laser sensors is the same as that of the laser emitting devices; each of the laser sensors is mounted on a position of the fixing arm, while the position is adjacent to the end where the two outside most forks are connected to the fixing arm; the laser sensors are aligned with the laser emitting devices one to one. 4. The transporting device according to claim 1 , wherein the transporting device further comprises an alarming device connected to the processor; the processor will control the alarming device to alarm if the first amplitude is larger than the first threshold. 5. The transporting device according to claim 4 , wherein when the at least two forks are not carrying the substrate, the laser sensors receive the lasers emitted from the laser emitting devices, sense the displacement of the at least two forks via the lasers and generate a second corresponding sensing signal; the processor processes the second sensing signal generated by the laser sensors, attain a second amplitude of the at least two forks when they are not carrying the substrate, and compare the second amplitude with a second preset threshold; the processor will control the alarming device to alarm if the second amplitude is larger than the second threshold.
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