Electron exit window foil

Patent metadata

Field	Value
Publication number	US-9384934-B2
Application number	US-201113885555-A
Country	US
Kind code	B2
Filing date	Nov 9, 2011
Priority date	Dec 2, 2010
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment is provided. The electron exit window foil comprises a sandwich structure having a film of Ti, a first layer of a material having a higher thermal conductivity than Ti, and a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment.

First claim

The invention claimed is:

1. An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment, the electron exit window foil comprising a sandwich structure having
a film of Ti,
a first layer of a material having a higher thermal conductivity than Ti,
a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment, and
at least one adhesive barrier coating between the Ti film and the first layer and/or the second layer,
wherein said at least one adhesive barrier coating is a layer of Al 2 O or ZrO 2 .

2. The electron exit window foil according to claim 1 , wherein the first layer is arranged between the film and the second layer.

3. The electron exit window foil according to claim 1 , wherein the Ti film is arranged between the first layer and the second layer.

4. The electron exit window foil according to claim 1 , wherein the material of the first layer has a ratio between thermal conductivity and density higher than that of Ti.

5. The electron exit window foil according to claim 1 , wherein the first layer is selected from the group consisting of Al, Cu, Ag, Au, and Mo.

6. The electron exit window foil according to claim 1 , wherein the second layer is selected from the group consisting of Al 2 O 3 , Zr, Ta, and Nb.

7. The electron exit window foil according to claim 1 , wherein said at least one adhesive barrier coating is between the first layer and the second layer, and wherein said layers are arranged on the same side of the Ti film.

8. The electron exit window foil according to claim 1 , wherein said at least one adhesive barrier coating has a thickness between 1 and 150 nm.

9. An electron beam generator configured to operate in a corrosive environment, comprising
a body housing and protecting an assembly generating and shaping the electron beam, and
a support carrying components relating to the output of the electron beam, said support comprising an electron exit window foil according to claim 1 .

10. A method for providing an electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment, said method comprising:
providing a film of Ti,
providing a first layer of a material having a higher thermal conductivity than Ti onto a first side of said film,
providing a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment, and
providing at least one adhesive barrier coating between the Ti film and the first layer and/or the second layer,
wherein said at least one adhesive barrier coating is a layer of Al 2 O or ZrO 2 .

11. The method of claim 10 , wherein the providing of the flexible second layer comprises arranging said flexible second layer onto a second side of said film.

12. The method according to claim 10 , wherein the providing of the flexible second layer comprises arranging said flexible second layer onto said first layer.

13. The method according to claim 10 , wherein at least one of the providing of the first layer or the providing of the flexible second layer is preceded by providing an adhesive coating onto said film.

14. A method for providing a high performance electron beam device, comprising:
providing a foil-frame subassembly comprising the steps of:
attaching a film of Ti onto a frame, and
processing said film by providing a first layer of a material having a higher thermal conductivity than Ti onto a first side of said film, and providing a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment and
attaching said foil-frame subassembly to a tube housing of an electron beam device for sealing said electron beam device.

Assignees

• Poppi Luca
• Kristiansson Anders
• Kristiansson Krister
• Zigerlig Benno
• Haag Werner
• Holm Kurt
• Näslund Lars-Åke
• Tetra Laval Holdings & Finance

Inventors

• Poppi Luca
• Kristiansson Anders
• Zigerlig Benno
• Haag Werner
• Holm Kurt
• Näslund Lars-Åke

Classifications

• H01J29/006

  Arrangements for eliminating unwanted temperature effects · CPC title

• B32B37/18

  involving the assembly of discrete sheets or panels only · CPC title

• C23C28/3455

  with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer · CPC title

• B32B2307/302

  Conductive · CPC title

• H01J37/3002

  Details · CPC title