Electron exit window foil

Patent metadata

Field	Value
Publication number	US-2016307724-A1
Application number	US-201615198067-A
Country	US
Kind code	A1
Filing date	Jun 30, 2016
Priority date	Dec 2, 2010
Publication date	Oct 20, 2016
Grant date	—

Abstract

An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment is provided. The electron exit window foil comprises a sandwich structure having a film of Ti, a first layer of a material having a higher thermal conductivity than Ti, and a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment.

First claim

1 . An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment, the electron exit window foil comprising a sandwich structure having
a film of Ti, a first layer of a material having a higher thermal conductivity than Ti, and a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment, wherein the first layer is arranged between the film and the second layer.

2 . The electron exit window foil according to claim 1 , wherein the material of the first layer has a ratio between thermal conductivity and density higher than that of Ti.

3 . The electron exit window foil according to claim 1 , wherein the first layer is selected from the group consisting of Al, Cu, Ag, Au, and Mo.

4 . The electron exit window foil according to claim 1 , wherein the second layer is selected from the group consisting of Al 2 O 3 , Zr, Ta, and Nb.

5 . The electron exit window foil according to claim 1 , further comprising at least one adhesive barrier coating.

6 . The electron exit window foil according to claim 5 , wherein said at least one adhesive barrier coating is a layer of Al 2 O 3 or ZrO 2 .

7 . The electron exit window foil according to claim 5 , wherein said at least one adhesive barrier coating is between the Ti film and the first layer.

8 . The electron exit window foil according to claim 5 , wherein said at least one adhesive barrier coating is between the first layer and the second layer.

9 . The electron exit window foil according to claim 5 , wherein said at least one adhesive barrier coating has a thickness between 1 and 150 nm.

10 . An electron beam generator configured to operate in a corrosive environment, comprising
a body housing and protecting an assembly generating and shaping the electron beam, and a support carrying components relating to the output of the electron beam, said support comprising an electron exit window foil according to claim 1 .

11 . A method for providing an electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment, said method comprising:
providing a film of Ti, providing a first layer of a material having a higher thermal conductivity than Ti onto a side of said film, and providing a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is configured to face the corrosive environment, wherein the film, first layer, and second layer are provided in a manner in which the the first layer is arranged between the film and the second layer.

12 . The method according to claim 11 , wherein the material of the first layer has a ratio between thermal conductivity and density higher than that of Ti.

13 . The method according to claim 11 , wherein the first layer is selected from the group consisting of Al, Cu, Ag, Au, and Mo.

14 . The method according to claim 11 , wherein the second layer is selected from the group consisting of Al 2 O 3 , Zr, Ta, and Nb.

15 . The method according to claim 11 , further comprising providing at least one adhesive barrier coating.

16 . The method according to claim 15 , wherein said at least one adhesive barrier coating is a layer of Al 2 O 3 or ZrO 2 .

17 . The method according to claim 15 , wherein said at least one adhesive barrier coating is provided between the Ti film and the first layer.

18 . The method according to claim 15 , wherein said at least one adhesive barrier coating is provided between the first layer and the second layer.

19 . The method according to claim 15 , wherein said at least one adhesive barrier coating has a thickness between 1 and 150 nm.

20 . A method for providing a high performance electron beam device, comprising:
providing a body housing and protecting an assembly generating and shaping the electron beam, and providing a support carrying components relating to the output of the electron beam, wherein providing said support comprises providing an electron exit window foil according to the method of claim 11 .

Assignees

• Tetra Laval Holdings & Finance

Inventors

• Poppi Luca
• Kristiansson Anders
• Zigerlig Benno
• Haag Werner
• Holm Kurt
• NÄSLUND Lars-Áke

Classifications

• H01J29/006

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• H01J2237/164

  Particle-permeable windows · CPC title

• H01J33/04 Primary

  Windows · CPC title

• Y10T29/49002

  Electrical device making · CPC title

• C23C28/3455

  with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer · CPC title