Stable tin free catalysts for electroless metallization

Patent metadata

Field	Value
Publication number	US-9382626-B2
Application number	US-201514794880-A
Country	US
Kind code	B2
Filing date	Jul 9, 2015
Priority date	Aug 17, 2011
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

Catalysts which include nanoparticles of palladium metal and cellulose derivatives are used in electroless metal plating. The palladium catalysts are free of tin.

First claim

What is claimed is:

1. A method comprising:
a) providing a substrate;
b) applying an aqueous catalyst solution to the substrate, the aqueous catalyst solution comprises one or more antioxidants, nanoparticles of palladium metal and one or more compounds chosen from polymers having a formula:

wherein R 1 , R 2 , R 3 , R 4 , R 5 , R 6 and R 7 are the same or different and chosen from —H, —CH 2 COOX, —C(O)—CH 3 , —C(O)—(CH 2 ) z —CH 3 and

wherein n is an integer of at least 2, z is an integer of at least 1 and X is —H or a counter cation, and a reaction product of a polymer having a formula:

wherein R 9 , R 10 , R 11 , R 12 , R 13 , R 14 , and R 15 are the same or different and are chosen from —H, —CH 3 , —CH 2 CH 3 , —CH 2 OH, —[CH 2 CHR 8 ] x —OH, —CH 2 CH(OH)CH 3 , —(CH 2 CHR 8 O) y —H, with the proviso that at least one of R 9 , R 10 , R 11 , R 12 , R 13 , R 14 , and R 15 is —CH 2 OH, —[CH 2 CHR 8 ] x —OH, —CH 2 CH(OH)CH 3 or —(CH 2 CHR 8 O) y —H, wherein R 8 is —H or —CH 3 , x and y are an integer of at least 1 and n and z are as described above, and a quaternary compound having a formula:

wherein m is an integer from 1 to 16, Y is halogen, Z − is a counter anion, R 16 , R 17 and R 18 are the same or different and are —H, —CH 3 or —(CH 2 ) p —CH 3 , and R 19 is —H or —CH 3 and p is an integer of 1 to 9, and one or more cross-linking agents, the aqueous catalyst solution is free of tin; and
c) electrolessly depositing metal onto the substrate using an electroless metal plating bath.

2. The method of claim 1 , wherein the substrate comprises a plurality of through-holes.

3. The method of claim 1 , wherein the electroless metal plating bath is chosen from a copper, copper alloy, nickel and nickel alloy bath.

4. The method of claim 1 , wherein at least one of R 2 , R 3 , R 5 , R 6 and R 7 is —CH 2 COOX or —C(O)—CH 3 .

5. The method of claim 1 , wherein the cross-linking agent is chosen from one or more of haloepoxy compounds and di-epoxy compounds.

6. The method of claim 1 , wherein the nanoparticles are 1 nm to 1000 nm.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Liu Feng
• Rzeznik Maria Anna

Classifications

• B01J35/45

  Nanoparticles · CPC title

• B01J2235/30

  Scanning electron microscopy; Transmission electron microscopy · CPC title

• C23C18/50

  with alloys based on iron, cobalt or nickel · CPC title

• C23C18/2086

  with use of organic or inorganic compounds other than metals, first · CPC title

• B01J37/0201

  Impregnation · CPC title