Chuck table

Patent metadata

Field	Value
Publication number	US-9381577-B2
Application number	US-201314041461-A
Country	US
Kind code	B2
Filing date	Sep 30, 2013
Priority date	Oct 2, 2012
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

A chuck table holds a workpiece having a warp. The chuck table includes a suction holding member having a suction holding surface for holding the workpiece under suction, and an annular seal member provided around the outer circumference of the suction holding member for supporting a peripheral portion of the workpiece. The annular seal member is formed from an elastic member. The upper surface of the annular seal member is set higher in level than the suction holding surface according to the warp of the workpiece. In holding the workpiece on the chuck table under suction, vacuum leaking from the gap between the workpiece and the suction holding surface due to the warp of the workpiece is applied to the space defined by the workpiece and the annular seal member, thereby elastically deforming the annular seal member to flatten the upper surface of the workpiece.

First claim

What is claimed is:

1. A chuck table for holding a workpiece having a warp thereon, comprising:
a suction holding member having an upper surface as a suction holding surface for holding said workpiece under suction;
an annular seal member provided so as to surround the outer circumference of said suction holding member, said annular seal member having a lower surface and an upper surface for supporting a peripheral portion of said workpiece held on said suction holding surface, said annular seal member being formed from an elastic member;
a support portion provided below said suction holding member and said annular seal member, said support portion including a seating surface and a radial outermost surface wherein the radial outermost surface of said support portion is completely located radially inwardly of a radial outermost surface of said workpiece held on said suction holding surface; and
a vacuum source connected to said suction holding member for producing a vacuum and applying the vacuum to said suction holding surface;
the upper surface of said annular seal member being set higher in level than said suction holding surface according to the warp of said workpiece and the lower surface of said annular seal member being seated upon and in contact with the seating surface of the support portion regardless of whether or not the workpiece is being held under suction;
whereby when the vacuum produced by said vacuum source is applied to said suction holding surface, the peripheral portion of said workpiece comes into contact with the upper surface of said annular seal member to thereby seal off the vacuum leaking from the gap between said workpiece and said suction holding surface due to the warp of said workpiece, so that said annular seal member is elastically deformed by the vacuum applied to the peripheral portion of said workpiece and the upper surface of said workpiece is therefore flattened to thereby hold the workpiece under suction.

2. The chuck table according to claim 1 , wherein the radial outermost surface of the support portion is generally cylindrical in shape.

3. The chuck table according to claim 1 , wherein the support portion includes a plurality of notches in the outermost surface thereof.

4. The chuck table according to claim 1 , wherein the seating surface of the support portion is a planar surface that extends generally in the same direction as a lower surface of the workpiece.

Assignees

• Disco Corp

Inventors

• Iizuka Kentaro
• Terajima Masato

Classifications

• H10P72/0616 Primary

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• Y10T279/11

  Vacuum · CPC title

• H01L21/6838

  Electricity · mapped topic

• B23B31/307 Primary

  Vacuum chucks · CPC title