Port door positioning apparatus and associated methods

Patent metadata

Field	Value
Publication number	US-9378995-B2
Application number	US-201414508974-A
Country	US
Kind code	B2
Filing date	Oct 7, 2014
Priority date	Jun 30, 2010
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

First claim

What is claimed is:

1. An apparatus, comprising:
a frame defined to have an opening through which a container door is accessible, the container door associated with a container configured to carry at least one workpiece within a semiconductor fabrication facility;
a port door configured to fit through the opening of the frame to interface with the container door;
a first stationary cam plate affixed to the frame at a position along a first side of the opening of the frame, the first stationary cam plate having formed therein a first channel angled toward the frame;
a second stationary cam plate affixed to the frame at a position along a second side of the opening of the frame, the second side substantially opposite the first side relative to the opening of the frame, the second stationary cam plate having formed therein a second channel angled toward the frame, wherein the position of the first stationary cam plate along the first side of the opening of the frame and the position of the second stationary cam plate along the second side of the opening of the frame enable control of an angle between the port door and the frame as measured in a horizontal plane;
a first movable closure mechanism secured to the port door and defined to move relative to both the port door and the frame, a portion of the first moveable closure mechanism defined to fit within and move along the first channel of the first stationary cam plate as the first moveable closure mechanism moves relative to both the port door and the frame; and
a second movable closure mechanism secured to the port door and defined to move relative to both the port door and the frame, a portion of the second moveable closure mechanism defined to fit within and move along the second channel of the second stationary cam plate as the second moveable closure mechanism moves relative to both the port door and the frame.

2. The apparatus as recited in claim 1 , wherein the first movable closure mechanism is secured to a back surface of the port door, and wherein the second movable closure mechanism is secured to the back surface of the port door.

3. The apparatus as recited in claim 2 , wherein the first movable closure mechanism is positioned next to a left side of the port door, and wherein the second movable closure mechanism is positioned next to a right side of the port door.

4. The apparatus as recited in claim 3 , wherein the portion of the first moveable closure mechanism extends beyond a perimeter of the back surface of the port door and in a direction substantially parallel to the back surface of the port door, and wherein the portion of the second moveable closure mechanism extends beyond the perimeter of the back surface of the port door and in a direction substantially parallel to the back surface of the port door.

5. The apparatus as recited in claim 4 , wherein the portion of the first moveable closure mechanism is a first roller, and wherein the portion of the second moveable closure mechanism is a second roller.

6. The apparatus as recited in claim 4 , wherein the portion of the first moveable closure mechanism is a first rigid guide pin, and wherein the portion of the second moveable closure mechanism is a second rigid guide pin.

7. The apparatus as recited in claim 4 , wherein the portion of the first moveable closure mechanism is a first rotatable guide pin, and wherein the portion of the second moveable closure mechanism is a second rotatable guide pin.

8. The apparatus as recited in claim 2 , wherein the first moveable closure mechanism moves in a substantially vertical direction relative to both the port door and the frame, and wherein the second moveable closure mechanism moves in the substantially vertical direction relative to both the port door and the frame.

9. The apparatus as recited in claim 2 , further comprising:
a drive source affixed to the back surface of the port door, the drive source defined to control movement of the first and second moveable closure mechanisms.

10. The apparatus as recited in claim 9 , further comprising:
a position device connected to the port door, the position device defined to move the port door to a position where 1) the portion of the first moveable closure mechanism is located to begin moving along the first channel of the first stationary cam plate when the first movable closure mechanism is moved relative to both the port door and the frame, and 2) the portion of the second moveable closure mechanism is located to begin moving along the second channel of the second stationary cam plate when the second movable closure mechanism is moved relative to both the port door and the frame.

11. An apparatus, comprising:
a frame defined to have an opening through which a container door is accessible, the container door associated with a container configured to carry at least one workpiece within a semiconductor fabrication facility;
a port door configured to fit through the opening of the frame to interface with the container door;
a first stationary cam plate affixed to the port door at a position along a first side of the port door, the first stationary cam plate having formed therein a first channel angled toward the frame;
a second stationary cam plate affixed to the port door at a position along a second side of the port door, the second side substantially opposite the first side relative to the port door, the second stationary cam plate having formed therein a second channel angled toward the frame, wherein the position of the first stationary cam plate along the first side of the port door and the position of the second stationary cam plate along the second side of the port door enable control of an angle between the port door and the frame as measured in a horizontal plane;
a first movable closure mechanism secured to the frame and defined to move relative to both the port door and the frame, a portion of the first moveable closure mechanism defined to fit within and move along the first channel of the first stationary cam plate as the first moveable closure mechanism moves relative to both the port door and the frame; and
a second movable closure mechanism secured to the frame and defined to move relative to both the port door and the frame, a portion of the second moveable closure mechanism defined to fit within and move along the second channel of the second stationary cam plate as the second moveable closure mechanism moves relative to both the port door and the frame.

12. The apparatus as recited in claim 11 , wherein the first stationary cam plate is secured to a back surface of the port door, and wherein the second stationary cam plate is secured to the back surface of the port door.

13. The apparatus as recited in claim 12 , wherein the first stationary cam plate is positioned next to a left side of the port door, and wherein the second stationary cam plate is positioned next to a right side of the port door.

14. The apparatus as recited in claim 13 , wherein the portion of the first stationary cam plate that includes the first channel is positioned outside a perimeter of the back surface of the port door, and wherein the portion of the second stationary cam plate that includes the second channel is positioned outside the perimeter of the back surface of the port door.

15. The apparatus as recited in claim 14 , wherein the portion of the first moveable closure mechanism is a first roller, and wherein the portion of the second moveable closure mechanism is a second roller.

16. The apparatus as recited in claim 14 , wherein the portion of the first moveable closure mechanism is a f

Assignees

• Brooks Automation Inc

Inventors

• Bonora Anthony C

Classifications

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/34

  the wafers being stored in a carrier, involving loading and unloading · CPC title

• H10P72/3406 Primary

  involving removal of lid, door or cover · CPC title

• E06B7/32

  Serving doors; Passing-through doors {; Pet-doors} · CPC title

• E06B5/00

  Doors, windows, or like closures for special purposes {(insulated compound frames specially adapted for sliding doors or windows E06B3/26347)}; Border constructions therefor · CPC title