Hardmask composition and method of forming patterns using the hardmask composition

Patent metadata

Field	Value
Publication number	US-9371444-B2
Application number	US-201514602856-A
Country	US
Kind code	B2
Filing date	Jan 22, 2015
Priority date	May 16, 2014
Publication date	Jun 21, 2016
Grant date	Jun 21, 2016

Abstract

A hardmask composition and a method of forming patterns, the composition including a solvent; and a polymer including a moiety represented by the following Chemical Formula 1,

First claim

What is claimed is:

1. A hardmask composition, comprising:
a solvent; and
a polymer including a moiety represented by the following Chemical Formula 4,

wherein, in the above Chemical Formula 4,
X 0 is a hydroxy group, a cyano group, a thiol group, an amino group, a halogen, or a halogen-containing group,
X 0 -M 2 -of chemical 4 is represented by one of the following Chemical Formula 3a′ or 3b′:

l is 1,
m is an integer of 1 to 3,
n is an integer of 1 to 10,
M 1 is represented by one of the following Chemical Formula 2a or 2b,
M 2 is represented by one of the following Chemical Formula 3a or 3b, and
* represents a binding site to a neighboring atom:

wherein, in the above Chemical Formulae 2a, 2b, 3a′, 3b′, 3a, and 3b,
A 1 to A 4 are each independently an aliphatic cyclic group or an aromatic ring group,
X 1 to X 4 are each independently hydrogen, a hydroxy group, a cyano group, a thiol group, an amino group, a halogen, a halogen-containing group, or a combination thereof, and
* represents a binding site to a neighboring atom.

2. The hardmask composition as claimed in claim 1 , wherein A 1 to A 4 are each independently a substituted or unsubstituted group selected from the following Group 1:
[Group 1]

wherein, in Group 1,
Z 1 and Z 2 are each independently a single bond, a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C3 to C20 cycloalkylene group, a substituted or unsubstituted C6 to C20 arylene group, a substituted or unsubstituted C2 to C20 heteroarylene group, a substituted or unsubstituted C2 to C20 alkenylene group, a substituted or unsubstituted C2 to C20 alkynylene group, C═O, NR a , oxygen, sulfur, or a combination thereof, in which R a is hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen, or a combination thereof, and
Z 3 to Z 17 are each independently C═O, NR d , oxygen, sulfur, CR b R c , or a combination thereof, in which R b to R d are each independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen, a halogen-containing group, or a combination thereof.

3. The hardmask composition as claimed in claim 1 , wherein:
M 1 and M 2 each independently include at least one polycyclic aromatic group.

4. The hardmask composition as claimed in claim 1 , wherein:
M 1 has a larger molecular weight than M 2 .

5. The hardmask composition as claimed in claim 1 , wherein M 1 is represented by one of the following Chemical Formula 2-1a, 2-1b, 2-2a, 2-2b, 2-3a, or 2-3b:

wherein, in the above Chemical Formulae 2-1a, 2-1b, 2-2a, 2-2b, 2-3a, and 2-3b, X′ and X 2 are each independently hydrogen, a hydroxy group, a cyano group, a thiol group, an amino group, a halogen, a halogen-containing group, or a combination thereof.

6. The hardmask composition as claimed in claim 1 , wherein M 2 is represented by one of the following Chemical Formula 3-1a, 3-1b, 3-2a, or 3-2b:

wherein, in the above Chemical Formulae 3-1a, 3-1b, 3-2a, and 3-2b, X 3 and X 4 are each independently hydrogen, a hydroxy group, a cyano group, a thiol group, an amino group, a halogen, a halogen-containing group, or a combination thereof.

7. The hardmask composition as claimed in claim 1 , wherein the polymer includes a moiety represented by one of the following Chemical Formula 1-2, 1-3, or 1-4:

wherein, in the above Chemical Formulae 1-2, 1-3, and 1-4,
X b , X c , and X d are each independently a hydroxy group, a cyano group, a thiol group, an amino group, a halogen, a halogen-containing group, or a combination thereof, and
n is an integer of 1 to 10.

8. The hardmask composition as claimed in claim 1 , wherein the polymer has a weight average molecular weight of about 1,000 to about 100,000.

9. The hardmask composition as claimed in claim 1 , wherein the polymer is included in the composition an amount of about 0.1 to about 30 parts by weight, based on 100 parts by weight of the solvent.

10. A method of forming patterns, the method comprising:
providing a material layer on a substrate,
applying the hardmask composition as claimed in claim 1 on the material layer to form a hardmask layer,
heat-treating the hardmask composition to form a hardmask layer,
forming a silicon-containing thin layer on the hardmask layer,
forming a photoresist layer on the silicon-containing thin layer,
exposing and developing the photoresist layer to form a photoresist pattern,
selectively removing the silicon-containing thin layer and the hardmask layer using the photoresist pattern to expose a part of the material layer, and
etching the exposed part of the material layer.

11. The method as claimed in claim 10 , wherein applying the hardmask composition includes performing a spin-on coating.

12. The method as claimed in claim 10 , wherein heat-treating the hardmask composition to form a hardmask layer includes heat-treating at about 100° C. to about 500° C.

13. The method as claimed in claim 10 , further comprising forming a bottom antireflective coating on the silicon-containing thin layer prior to forming the photoresist layer.

14. The method as claimed in claim 10 , wherein the silicon-containing thin layer includes silicon oxynitride, silicon oxide, silicon nitride, or a combination thereof.

Assignees

• Samsung Sdi Co Ltd

Inventors

• Choi Yoo-Jeong
• Kim Yun-Jun
• Kim Young-Min
• Moon Joon-Young
• Park Yu-Shin
• Song Hyun-Ji
• Yoon Yong-Woon
• Lee Chung-Heon

Classifications

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P50/695

  characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title

• H10P50/692

  characterised by their composition, e.g. multilayer masks or materials · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10P50/71

  using masks for conductive or resistive materials · CPC title