Hardmask composition and method of forming patterns using the hardmask composition
US-9371444-B2 · Jun 21, 2016 · US
This page is not indexed by search engines while we improve data quality.
Patent family 54537985
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 54537985 |
| Family type | — |
| Earliest priority | May 16, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9371444B2 — Hardmask composition and method of forming patterns using the hardmask composition |
Representative publication
Best representative member for this family based on priority and filing country.
US9371444B2 — Hardmask composition and method of forming patterns using the hardmask composition (published Jun 21, 2016)
Member publications
Related publications in this family.