Transistor with recess gate and method for fabricating the same

Patent metadata

Field	Value
Publication number	US-9368586-B2
Application number	US-201213719808-A
Country	US
Kind code	B2
Filing date	Dec 19, 2012
Priority date	Jun 29, 2012
Publication date	Jun 14, 2016
Grant date	Jun 14, 2016

Abstract

A transistor including a recessed gate structure having improved doping characteristics and a method for forming such a transistor. The transistor includes a recess in a semiconductor substrate, where the recess is filled with a recessed gate structure including an impurity doped layer and a layer doped with a capture species. The capture species accumulates the impurity and diffuses the impurity to other layers of the recessed gate structure.

First claim

What is claimed is:

1. A method for fabricating a transistor, comprising:
forming a recess in a semiconductor substrate;
forming a gate dielectric layer over the semiconductor substrate;
forming a gate conductive layer including a first undoped silicon layer and a third undoped silicon layer over the gate dielectric layer, the gate conductive layer including an intermediate undoped silicon layer that functions as a capture zone;
doping the gate conductive layer with an impurity after the forming of the gate conductive layer, wherein the impurity is accumulated in the capture zone;
etching the first undoped silicon layer, a third undoped silicon layer, and the intermediate undoped silicon layer to form a recess gate structure; and
diffusing the impurity by performing annealing,
wherein the capture zone included in the recess gate structure contains a capture species comprising at least one of carbon or nitrogen to capture the impurity,
wherein the first undoped silicon layer and the third undoped silicon layer included in the recess gate structure have the same thickness,
wherein the first undoped silicon layer and the intermediate undoped silicon layer included in the recess gate structure are conformally formed not to fill the recess and the third undoped silicon layer included in the recess gate structure is formed over the intermediate undoped silicon layer to fill the recess.

2. The method according to claim 1 , wherein the capture zone is formed in the recess.

3. The method according to claim 1 , wherein the gate conductive layer comprises a silicon layer.

4. A method for fabricating a transistor, comprising:
forming a recess in a semiconductor substrate;
forming a gate dielectric layer over the semiconductor substrate;
forming, over the gate dielectric layer, a gate conductive layer including a lower silicon layer, an intermediate undoped silicon layer, and an upper silicon layer, wherein the intermediate undoped silicon layer contains a capture species;
doping the gate conductive layer with a first impurity, wherein the first impurity is accumulated in the capture species of the intermediate undoped silicon layer;
diffusing the first impurity accumulated in the intermediate undoped silicon layer to the lower silicon layer by performing annealing; and
etching the lower silicon layer, the intermediate undoped silicon layer and the upper silicon layer to form a recess gate structure,
wherein the lower silicon layer and the intermediate undoped silicon layer included in the recess gate structure are conformally formed not to fill the recess and the upper silicon layer included in the recess gate structure is formed over the intermediate undoped silicon layer to fill the recess,
wherein the lower silicon layer and the upper silicon layer included in the recess gate structure have the same thickness.

5. The method according to claim 4 , wherein the intermediate undoped silicon layer is formed in the recess.

6. The method according to claim 4 , wherein the capture species comprises at least one of carbon or nitrogen.

7. The method according to claim 4 , wherein the forming of the gate conductive layer further comprises:
in situ doping the capture species into the intermediate undoped silicon layer.

8. The method according to claim 4 , wherein the lower silicon layer, the intermediate undoped silicon layer, and the upper silicon layer comprise undoped polysilicon.

9. The method according to claim 4 , wherein the first impurity comprises boron or phosphorus.

10. The method according to claim 4 , further comprising:
forming a metal layer over the gate conductive layer after the first impurity is diffused;
forming a gate structure by etching the metal layer and the gate conductive layer;
forming source/drain regions by doping a second impurity into the semiconductor substrate over both sides of the gate structure; and
diffusing the second impurity in the source/drain regions by performing annealing.

11. A method for fabricating a transistor, comprising:
forming recesses in first and second regions of a semiconductor substrate;
forming a gate dielectric layer over the semiconductor substrate having the recesses;
forming, over the gate dielectric layer, a gate conductive layer in the first region and in the second region, the gate conductive layer including a lower silicon layer, an intermediate undoped silicon layer, and an upper silicon layer, wherein the intermediate undoped silicon layer contains a capture species;
doping the gate conductive layer in the first region with a first impurity, and doping the gate conductive layer in the second region with a second impurity that is different from the first impurity, wherein the first impurity and the second impurity are accumulated in the intermediate undoped silicon layer in the first region and in the second region, respectively;
diffusing the first impurity and the second impurity in the first region and in the second region to the lower silicon layer, respectively, by performing annealing; and
etching the lower silicon layer, the intermediate undoped silicon layer and the upper silicon layer to form a recess gate structure,
wherein the lower silicon layer and the intermediate undoped silicon layer included in the recess gate structure are conformally formed not to fill the recess and the upper silicon layer included in the recess gate structure is formed over the intermediate undoped silicon layer to fill the recess,
wherein the lower silicon layer and the upper silicon layer included in the recess gate structure have the same thickness.

12. The method according to claim 11 , wherein the intermediate undoped silicon layer is formed in the recesses.

13. The method according to claim 11 , wherein the capture species comprises at least one of carbon or nitrogen.

14. The method according to claim 11 , wherein the forming of the gate conductive layer further comprises:
in-situ doping the capture species into the intermediate undoped silicon layer.

15. The method according to claim 11 , wherein the first impurity comprises boron, and the second impurity comprises phosphorus.

16. The method according to claim 11 , wherein the lower layer, the intermediate undoped silicon layer and the upper layer comprise undoped polysilicon.

17. The method according to claim 11 , wherein the first region is a PMOS region, and the second region is an NMOS region.

18. The method according to claim 11 , further comprising:
forming a metal layer over the gate conductive layer after diffusing the first impurity and the second impurity;
forming a gate structure by etching the metal layer and the gate conductive layer;
forming source/drain regions by doping a third impurity into the semiconductor substrate over both sides of the gate structure; and
diffusing the third impurity in the source/drain regions by performing annealing.

19. A method for fabricating a transistor, the method comprising:
forming a gate dielectric layer over a semiconductor substrate that includes a first region that defines a recess and a second region having a planar surface;
forming, over the gate dielectric layer, a gate conductive layer in the first region and in the second region, the gate conductive layer including a lower silicon layer, an intermediate undoped silicon layer, and an upper silicon layer, wherein the intermediate undoped silicon layer contains a capture species;
doping the gate conductive layer in the first region with a first impurity, and doping the gate conductive layer in

Assignees

• Sk Hynix Inc

Inventors

• Rouh Kyong-Bong
• Eun Yong-Seok
• Lee Mi-Ri

Classifications

• H10P32/302

  Doping polycrystalline silicon or amorphous silicon layers · CPC title

• H10D64/01312 Primary

  the additional layer comprising a metal or metal silicide formed by deposition, i.e. without a silicidation reaction, e.g. sputter deposition · CPC title

• H10D64/691

  comprising metallic compounds, e.g. metal oxides or metal silicates  (insulators comprising nitrogen H10D64/693) · CPC title

• H10D64/662

  the conductor further comprising additional layers, e.g. multiple silicon layers having different crystal structures · CPC title

• H10D64/513

  within recesses in the substrate, e.g. trench gates, groove gates or buried gates · CPC title