Ionization vacuum gauge

Patent metadata

Field	Value
Publication number	US-9355825-B2
Application number	US-201213661011-A
Country	US
Kind code	B2
Filing date	Oct 25, 2012
Priority date	Oct 28, 2011
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

An ionization vacuum gauge includes a cathode, an anode and an ion collector. The ion collector component is located at one side of the anode component and spaced from the anode component. The cathode component is located at another side of the anode component and includes an electron emitter, which extends toward the anode component from the cathode component. The electron emitter includes at least one carbon nanotube wire.

First claim

What is claimed is:

1. An ionization gauge, comprising:
an anode component, wherein the anode component comprises a metallic disk with a through hole, and a thickness of the metallic disk ranges from about 50 micrometers to about 1 millimeter;
an ion collector component located at one side of the anode component and spaced from the anode component; and
a cathode component located at another side of the anode component and comprising an electron emitter, wherein the electron emitter comprises a carbon nanotube wire extending toward the anode component, and aiming at a center point of the through hole.

2. The ionization gauge of claim 1 , wherein the electron emitter comprises an electron emitting terminal adjacent to the anode component, and a distance from the electron emitting terminal to the anode component ranges from about 1 millimeter to 9 millimeters.

3. The ionization gauge of claim 2 , wherein the electron emitting terminal comprises a plurality of electron emitting peaks.

4. The ionization gauge of claim 3 , wherein each of the plurality of electron emitting peaks comprises a plurality of carbon nanotubes parallel to each other.

5. The ionization gauge of claim 4 , wherein a summit of each of the plurality of electron peaks is defined by a single carbon nanotube protruding from the plurality of carbon nanotubes of each of the plurality of electron emitting peaks.

6. The ionization gauge of claim 5 , wherein a diameter of the plurality of carbon nanotubes is smaller than 5 nanometers.

7. The ionization gauge of claim 5 , wherein a distance between adjacent two of the summits of the plurality of electron peaks ranges from about 0.1 micrometers to about 2 micrometers.

8. The ionization gauge of claim 7 , wherein a ratio between the distance of adjacent two of the summits and a diameter of the single carbon nanotube ranges from about 20:1 to about 500:1.

9. The ionization gauge of claim 1 , wherein the carbon nanotube wire is a twisted carbon nanotube wire or an untwisted carbon nanotube wire.

10. The ionization gauge of claim 1 , wherein the ion collector is a metallic ring, a metal-enclosed aperture, a metallic net, or a metallic sheet.

11. The ionization gauge of claim 1 , wherein a center point of the cathode component, a center point of the anode component, and a center point of the ion collector component are on a common straight line.

12. The ionization gauge of claim 1 , wherein the cathode component and the ion collector component are spaced from the anode component at an equal distance.

13. The ionization gauge of claim 1 , wherein a diameter of the metallic disk ranges from about 4.1 millimeters to about 12 millimeters.

14. The ionization gauge of claim 1 , wherein a first distance d 1 between the anode component and the cathode component is equal to a second distance d 2 between the anode component and the ion collector component, and the first distance d 1 and the second distance d 2 are equal to a radius of the through hole.

15. An ionization gauge, comprising:
an anode component, wherein the anode component is a metallic disk with a through hole and a thickness of the metallic disk ranges from about 50 micrometers to about 1 millimeter;
a metallic wire configured to collect ions, the metallic being located at one side of the anode component and spaced from the anode component; and
an electron emitter located at another side of the anode component and extending toward the anode component, wherein the electron emitter comprises a carbon nanotube wire.

16. The ionization gauge of claim 15 , wherein a diameter of the metallic wire ranges from about 50 micrometers to about 1 millimeter.

17. The ionization gauge of claim 15 , wherein the electron emitter comprises a singe carbon nanotube wire extending toward the anode component.

18. The ionization gauge of claim 17 , wherein the metallic wire and the carbon nanotube wire are coaxial.

19. An ionization gauge, comprising:
an anode component, wherein the anode component is a metallic disk with a through hole and a thickness of the metallic disk ranges from about 50 micrometers to about 1 millimeter;
an ion collector component located at one side of the anode component and spaced from the anode component; and
a cathode component located at another side of the anode component and comprising an electron emitter, wherein the electron emitter comprises a carbon nanotube wire extending toward the anode component and aiming at a center point of the through hole, a first center point of the cathode component, a second center point of the through hole, and a third center point of the ion collector component is on a common straight line to form a symmetrical structure.

Assignees

• Liu Peng
• Zhou Duan-Liang
• Zhang chun-hai
• Qi Jing
• Chen Pi-Jin
• Fan Shou-Shan
• Univ Tsinghua
• Hon Hai Prec Ind Co Ltd

Inventors

• Liu Peng
• Zhou Duan-Liang
• Zhang chun-hai
• Qi Jing
• Chen Pi-Jin
• Fan Shou-Shan

Classifications

• H01J41/06 Primary

  with ionisation by means of cold cathodes · CPC title