Anode electrode shield for inverted magnetron cold cathode ionization gauge

Patent metadata

Field	Value
Publication number	US-10969290-B2
Application number	US-201715834625-A
Country	US
Kind code	B2
Filing date	Dec 7, 2017
Priority date	Dec 13, 2016
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.

First claim

What is claimed is:

1. A cold cathode ionization gauge (CCIG) comprising:
an extended anode;
a cathode surrounding the anode along a length of the anode, the cathode forming a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode, the cathode comprising a base plate having a base surface that forms a surface of the discharge space;
a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma;
a feedthrough insulator supporting the anode, the insulator extending through the base surface;
a shield mounted to the base surface of the cathode and surrounding and spaced from the anode, the shield electrically isolated from the insulator and shielding the insulator from electrons of the plasma, wherein the shield is spaced from the anode by a first spacing, the shield spaced from the insulator by a second spacing greater than the first spacing, the first and second spacings enabling shielding of the insulator from electrons of the plasma, the shielding including reflecting the electrons to diminish electron loss at a transition area from the anode to the insulator; and
an electric controller that applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.

2. The CCIG of claim 1 wherein the second spacing between the shield and the insulator is within a range of 0.9 to 2.7 millimeters.

3. The CCIG of claim 1 wherein the shield comprises a plate having an aperture through which the anode extends.

4. The CCIG of claim 3 wherein the aperture in the plate is circular and the first spacing is determined by the radius of the aperture.

5. The CCIG of claim 3 wherein the shield further comprises a spacer adapted to provide the second spacing between the plate and the insulator.

6. The CCIG of claim 5 wherein the spacer includes a leg that connects the shield to the cathode.

7. The CCIG of claim 6 wherein the spacer includes multiple legs that connect the shield to the cathode.

8. The CCIG of claim 3 wherein the shield comprises a cup that surrounds the insulator, and wherein the plate having the aperture is the base of the cup.

9. The CCIG of claim 8 wherein the aperture is circular and the first spacing is determined by the radius of the aperture.

10. The CCIG of claim 1 wherein a top portion of the insulator is covered with metal at anode potential.

11. The CCIG of claim 1 wherein the cathode includes a cylindrical side wall extending from the base plate, the base plate surrounding and being coupled to the insulator.

12. The CCIG of claim 1 wherein the first spacing between the shield and the anode is within a range of 0.9 to 2.7 millimeters.

13. A method of measuring pressure comprising:
applying a magnetic field to a discharge space between an anode and a cathode, the cathode comprising a base plate having a base surface that forms a surface of the discharge space;
releasing electrons into the discharge space to create a plasma discharge in the discharge space and ion current flow to the cathode;
with a shield mounted to the base surface of the cathode, shielding a feedthrough insulator supporting the anode from electrons of the plasma discharge, the insulator extending through the base surface, wherein the shield is spaced from the anode by a first spacing, the shield spaced from the insulator by a second spacing greater than the first spacing, the first and second spacings enabling shielding of the insulator from electrons of the plasma, the shielding including reflecting electrons to diminish electron loss at a transition area from the anode to the insulator; and
determining pressure based on measured ion current flow to the cathode.

14. The method of claim 13 wherein the first spacing between the shield and the anode is within a range of 0.9 to 2.7 millimeters.

15. The method of claim 13 wherein a top portion of the insulator is covered with metal at anode potential.

16. A cold cathode ionization gauge (CCIG) comprising:
an extended anode;
a cathode surrounding the anode along a length of the anode, the cathode forming a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode, the cathode comprising a base plate and a side wall extending from the base plate, the base plate forming a surface of the discharge space;
a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma;
a feedthrough insulator supporting the anode;
metal on the insulator surrounding the anode and at anode potential and facing the discharge space;
a shield plate mounted to the base plate over a base plate aperture, the shield plate defining a shield aperture above the insulator and through which the anode extends, the aperture dimensioned such that there is an electric field from the anode potential at the metal on the insulator directly to the cathode at a cathode potential with no electric field above the metal and shield aperture to draw electrons into the metal from the plasma; and
an electric controller that applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.

17. The CCIG of claim 16 wherein the shield plate is spaced from the anode by a first spacing provided at the shield aperture, the shield plate being spaced from the insulator at the shield aperture by a second spacing greater than the first spacing.

18. The CCIG of claim 17 wherein the shield aperture is circular and the first spacing is determined by the radius of the shield aperture.

19. The CCIG of claim 17 wherein the first spacing between the shield plate and the anode is within a range of 0.9 to 2.7 millimeters.

20. The CCIG of claim 17 wherein the second spacing between the shield plate and the insulator is within a range of 0.9 to 2.7 millimeters.

21. The CCIG of claim 16 wherein the side wall is cylindrical.

22. A cold cathode ionization gauge (CCIG) comprising:
an extended anode;
a cathode surrounding the anode along a length of the anode, the cathode forming a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode, the cathode comprising a base plate and a side wall extending from the base plate, the base plate forming a surface of the discharge space;
a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma;
a feedthrough insulator supporting the anode;
metal on the insulator surrounding the anode and at anode potential and facing the discharge space;
a shield plate suspended across a base plate aperture in the base plate, the shield plate defining a shield aperture above the insulator and through which the anode extends, the aperture dimensioned such that there is an electric field from the anode potential at the metal on the insulator directly to the cathode at a cathode potential with no electric field above the metal and shield aperture to draw electrons into the metal from the plasma; and
an electric controller that applies voltage between

Assignees

• Mks Instr Inc

Inventors

• Brucker Gerardo A
• Swinney Timothy C

Classifications

• H01J41/06 Primary

  with ionisation by means of cold cathodes · CPC title

• G01L21/34 Primary

  using electric discharge tubes with cold cathodes · CPC title

• G01L19/06

  Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa · CPC title