Cold cathode ionization vacuum gauge

Patent metadata

Field	Value
Publication number	US-10352811-B2
Application number	US-201715712916-A
Country	US
Kind code	B2
Filing date	Sep 22, 2017
Priority date	Sep 30, 2013
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

First claim

What is claimed is:

1. A cold cathode ionization vacuum gauge assembly comprising:
a cold cathode ionization vacuum gauge comprising:
an extended anode electrode; and
a cathode electrode surrounding the anode electrode along its length;
an electronics module configured to be coupled to the vacuum gauge in either of first and second configurations, in the first configuration the electronics module being displaced from the vacuum gauge and coupled to the vacuum gauge by a cabl…

Assignees

• Mks Instr Inc

Inventors

• Brucker Gerardo A
• Swinney Timothy C
• Kelly Brandon J
• Funari Alfred A
• Schott Michael N
• Schartau Kristian S

Classifications

• H01J41/06

  Electricity · mapped topic

• Y02W30/828

  Cross-Sectional Technologies · mapped topic

• H01J9/50 Primary

  Electricity · mapped topic

• Y10T29/49007

  Cross-Sectional Technologies · mapped topic

• G01L19/06

  Physics · mapped topic