Electrostatic chuck apparatus

Patent metadata

Field	Value
Publication number	US-9343346-B2
Application number	US-201113575545-A
Country	US
Kind code	B2
Filing date	Jan 28, 2011
Priority date	Jan 29, 2010
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

An electrostatic chuck apparatus including:
an electrostatic chuck section having one main surface that is a mounting surface on which a plate specimen is mounted, and being equipped with an electrostatic adsorbing internal electrode; and a temperature adjusting base section that adjusts the electrostatic chuck section to a desired temperature, wherein a heating member is bonded to a main surface of the electrostatic chuck section, which is opposite to the mounting surface, via an adhesive material, the whole or a part of the main surface of the temperature adjusting base section, which is on the side of the electrostatic chuck section, is covered with a sheet or film of insulating material, and the electrostatic chuck section bonded with the heating member and the temperature adjusting base section covered with the insulating material are bonded and integrated via an insulating organic adhesive layer formed by curing a liquid adhesive.

First claim

The invention claimed is:

1. An electrostatic chuck apparatus including:
an electrostatic chuck section having one main surface that is a mounting surface on which a plate specimen is mounted, and being equipped with an electrostatic adsorbing internal electrode; and a temperature adjusting base section that adjusts the electrostatic chuck section to a desired temperature,
wherein a heating member is bonded to a main surface of the electrostatic chuck section, which is opposite to the mounting surface, via an adhesive material, the heating member and the adhesive material having a predetermined pattern of the same shape,
the whole or a part of the main surface of the temperature adjusting base section, which is on the side of the electrostatic chuck section, is covered with a sheet or film of insulating material made of a resin having insulating properties and voltage endurance, and
the electrostatic chuck section bonded with the heating member and the temperature adjusting base section covered with the sheet or film of insulating material are bonded and integrated via an insulating organic adhesive layer formed by curing a liquid adhesive.

2. The electrostatic chuck apparatus according to claim 1 ,
wherein the sheet or film of insulating material is bonded to the temperature adjusting base section by a sheet or film of adhesive material.

3. The electrostatic chuck apparatus according to claim 1 or 2 ,
wherein a thickness of the electrostatic chuck section is equal to or greater than 0.7 mm and is equal to or less than 3.0 mm.

4. The electrostatic chuck apparatus according to claim 1 or 2 ,
wherein the heating member is a thin plate-shaped heater element formed from a nonmagnetic metal having a thickness of 0.2 mm or less.

5. The electrostatic chuck apparatus according to claim 1 or 2 ,
wherein the adhesive material is a silicone or acrylic adhesive material.

6. The electrostatic chuck apparatus according to claim 1 or 2 ,
wherein a variation of the thickness of the adhesive material is equal to or less than 10 μm.

7. The electrostatic chuck apparatus according to claim 1 or 2 ,
wherein the electrostatic chuck section includes a mounting plate having one main surface as the mounting surface, a support plate which is integrated with the mounting plate to support the mounting plate, and the electrostatic adsorbing internal electrode provided between the mounting plate and the support plate, and
the mounting plate is formed of an aluminum oxide-silicon carbide composite sintered body or a yttrium oxide sintered body.

8. The electrostatic chuck apparatus according to claim 7 ,
wherein the thickness of the mounting plate is equal to or greater than 0.3 mm and equal to or less than 2.0 mm.

Assignees

• Kosakai Mamoru
• Ishimura Kazunori
• Satou Takashi
• Hayahara Ryuuji
• Watanabe Takeshi
• Moriya Yoshiaki
• Furuuchi Kei
• Sumitomo Osaka Cement Co Ltd

Inventors

• Kosakai Mamoru
• Ishimura Kazunori
• Satou Takashi
• Hayahara Ryuuji
• Watanabe Takeshi
• Moriya Yoshiaki
• Furuuchi Kei

Classifications

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H01L21/6831 Primary

  Electricity · mapped topic

• H01L21/67103

  Electricity · mapped topic

• Y10T279/23

  with magnetic or electrostatic means · CPC title