Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article

Patent metadata

Field	Value
Publication number	US-9966245-B2
Application number	US-201514960583-A
Country	US
Kind code	B2
Filing date	Dec 7, 2015
Priority date	Dec 9, 2014
Publication date	May 8, 2018
Grant date	May 8, 2018

Abstract

A cooling apparatus for cooling a light source unit is provided. The cooling apparatus includes a cooling unit provided outside a path of light from the light source unit, and a heat pipe configured to connect a heat generating portion of the light source unit and the cooling unit. The heat pipe also serves as an electrode wire of the light source unit.

First claim

What is claimed is:

1. A cooling apparatus for cooling a light source unit, comprising:
a cooling unit having a heat sink provided outside a path of light from the light source unit; and
a heat pipe including a thermal conduction pipe having a first distal end, a second distal end, and a fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end,
wherein the heat pipe connects a heat generating portion of the light source unit disposed at the first distal end of the thermal conduction pipe and the heat sink disposed at the second distal end of the thermal conduction pipe, and moves heat generated at the heat generating portion to the heat sink by the fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end, and
the thermal conduction pipe also serves as an electrode wire of the light source unit.

2. The apparatus according to claim 1 , wherein the heat pipe has a structure that reduces a resistance by winding a bare stranded wire.

3. The apparatus according to claim 1 , wherein the light source unit comprises a discharge lamp,
the apparatus further comprises a connecting portion configured to connect a bayonet cap portion of the discharge lamp and the heat pipe, and
the connecting portion has a structure that changes a contact area between the bayonet cap portion and the connecting portion in accordance with a shape of the bayonet cap portion of the discharge lamp.

4. An illumination optical system comprising:
a plurality of light source units; and
a plurality of cooling apparatuses corresponding to the plurality of light source units, respectively,
wherein each of the plurality of cooling apparatuses comprises:
a cooling unit having a heat sink provided outside a path of light from a corresponding light source unit out of the plurality of light source units; and
a heat pipe including a thermal conduction pipe having a first distal end, a second distal end, and a fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end,
wherein the heat pipe connects a heat generating portion of the corresponding light source unit disposed at the first distal end of the thermal conduction pipe and the heat sink disposed at the second distal end of the thermal conduction pipe, and moves heat generated at the heat generating portion of the corresponding light source unit to the heat sink by the fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end, and
the thermal conduction pipe also serves as an electrode wire of the corresponding light source unit.

5. The system according to claim 4 , wherein the heat pipes of the plurality of cooling apparatuses are arranged such that shadows of the heat pipes are radially distributed at a constant interval around an optical axis on an effective light source distribution formed by the illumination optical system.

6. The system according to claim 5 , further comprising:
a measurement device configured to measure the effective light source distribution; and
a control unit configured to adjust a position, an angle, or the position and the angle of the light source unit as a whole based on a measurement result of the measurement device.

7. The system according to claim 5 , further comprising:
a measurement device configured to measure the effective light source distribution; and
a control unit configured to adjust a position, an angle, or the position and the angle of the heat pipe in the light source unit based on a measurement result of the measurement device.

8. An exposure apparatus comprising:
an illumination optical system configured to illuminate an original on which a pattern is formed; and
a projection optical system configured to project the pattern formed on the original onto a substrate,
wherein the illumination optical system comprises:
a plurality of light source units; and
a plurality of cooling apparatuses corresponding to the plurality of light source units, respectively,
each of the plurality of cooling apparatuses comprises:
a cooling unit having a heat sink provided outside a path of light from a corresponding light source unit out of the plurality of light source units; and
a heat pipe including a thermal conduction pipe having a first distal end, a second distal end, and a fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end,
wherein the heat pipe connects a heat generating portion of the corresponding light source unit disposed at the first distal end of the thermal conduction pipe and the heat sink disposed at the second distal end of the thermal conduction pipe, and moves heat generated at the heat generating portion of the corresponding light source unit to the heat sink by the fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end, and
the thermal conduction pipe also serves as an electrode wire of the corresponding light source unit.

9. A method of manufacturing an article comprising:
exposing a substrate using an exposure apparatus; and
developing the exposed substrate,
wherein the exposure apparatus comprises:
an illumination optical system configured to illuminate an original on which a pattern is formed; and
a projection optical system configured to project the pattern formed on the original onto the substrate,
the illumination optical system comprises:
a plurality of light source units; and
a plurality of cooling apparatuses corresponding to the plurality of light source units, respectively,
each of the plurality of cooling apparatuses comprises:
a cooling unit having a heat sink provided outside a path of light from a corresponding light source unit out of the plurality of light source units; and
a heat pipe including a thermal conduction pipe having a first distal end, a second distal end, and a fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end,
wherein the heat pipe connects a heat generating portion of the corresponding light source unit disposed at the first distal end of the thermal conduction pipe and the heat sink disposed at the second distal end of the thermal conduction pipe, and moves heat generated at the heat generating portion of the corresponding light source unit to the heat sink by the fluid sealed inside the thermal conduction pipe between the first distal end and the second distal end, and
the thermal conduction pipe also serves as an electrode wire of the corresponding light source unit.

Assignees

• Canon Kk

Inventors

• Hiruma Kentaro
• Furusawa Manato
• Osaka Noboru

Classifications

• G03F7/70891

  Temperature · CPC title

• G03F7/70016

  by discharge lamps · CPC title

• H01J61/86

  with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection · CPC title

• G03F7/32

  Liquid compositions therefor, e.g. developers · CPC title

• G03F7/20 Primary

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title