Method and apparatus to help promote contact of gas with vaporized material
US-2015337436-A1 · Nov 26, 2015 · US
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
US9170246B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9170246-B2 |
| Application number | US-201314054497-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 15, 2013 |
| Priority date | Oct 25, 2004 |
| Publication date | Oct 27, 2015 |
| Grant date | Oct 27, 2015 |
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Abstract
Official abstract text for this publication.
A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.
First claim
Opening claim text (preview).
What is claimed is: 1. A monitoring system for real-time, continuous monitoring of fluid inventory in an array of fluid-containing vessels in an ion implanter gas box during dispensing of fluid to an ion implanter from on-stream one(s) of said vessels, wherein the fluid-containing vessels include a sorbent medium having sorptive affinity for the fluid and from which the fluid is desorbed under dispensing conditions, said monitoring system comprising: at least one temperature sens…
Assignees
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Classifications
- F17C11/00Primary
Mechanical Engineering · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9170246B2 cover?
- A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data t…
- Who is the assignee on this patent?
- Entegris Inc
- What technology area does this patent fall under?
- Primary CPC classification F17C11/00. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Oct 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).