Method for purging a substrate container

Patent metadata

Field	Value
Publication number	US-9305817-B2
Application number	US-201313757954-A
Country	US
Kind code	B2
Filing date	Feb 4, 2013
Priority date	Feb 3, 2012
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

A method for purging a substrate container which accommodates in multiple stages a plurality of substrates to be processed by a substrate processing apparatus, the method includes: mounting the substrate container on a mounting unit; connecting a gas supply port provided in the substrate container and a gas supply line provided in a mounting unit; starting supply of a dry gas into the substrate container from a gas supply line before opening a cover of the substrate container; opening the cover of the substrate container while keeping the supply of the dry gas; closing the cover of the substrate container upon completion of processing of the substrates in the substrate container; and stopping the supply of the dry gas after closing the cover of the substrate container.

First claim

What is claimed is:

1. A substrate container purging method comprising:
mounting a substrate container, which accommodates in multiple stages a plurality of substrates to be processed by a substrate processing apparatus, on a mounting unit;
starting supply of a dry gas into the substrate container from a gas supply line before opening a cover of the substrate container;
opening the cover of the substrate container while keeping the supply of the dry gas;
closing the cover of the substrate container after all the substrates are processed and returned back into the substrate container; and
stopping the supply of the dry gas after closing the cover of the substrate container,
wherein, before said opening, the dry gas is supplied at a first flow rate and then at a second flow rate smaller than the first flow rate; and
wherein said starting the supply of the dry gas into the substrate container includes supplying the dry gas under a control of a control device such that a flow rate of the dry gas reaches the first flow rate at a predetermined ramp rate for a predetermined period of time.

2. The method of claim 1 , wherein before the substrate container is mounted on the mounting unit, an inside of the gas supply line is purged by the dry gas.

3. The method of claim 2 , further comprising providing a distribution line inside the substrate container,
wherein the distribution line has multiple openings arranged with vertical gaps therebetween, and
wherein the dry gas is supplied into the substrate container through the distribution line.

4. The method of claim 3 , wherein each opening at an upper portion of the distribution line is greater than each opening at a lower portion of the distribution line, and
wherein a flow rate of the dry gas flowing through the upper portion of the distribution line greater than a flow rate of the dry gas flowing though the lower portion of the distribution line.

5. The method of claim 1 , wherein the dry gas is supplied through a gas supply port formed at a bottom portion of the substrate container and the dry gas supplied into the substrate container is discharged via a gas exhaust port formed at the bottom portion Of the substrate container.

6. The method of claim 1 , wherein the dry gas is supplied through a gas supply port formed at a ceiling portion of the substrate container and the dry gas supplied into the substrate container is discharged via a gas exhaust port formed at the ceiling portion of the substrate container.

7. The method of claim 1 , wherein the dry gas is supplied into the substrate container through one or more rear gas supply port disposed away from the cover and one or more front gas supply ports positioned between the cover and the rear gas supply ports, and
wherein a flow rate of the dry gas supplied from the front gas supply ports is smaller than that of the dry gas supplied from the rear gas supply ports.

8. The method of claim 1 , wherein the dry gas is supplied into the substrate container through one or more rear gas supply ports disposed away from the cover and one or more front gas supply ports positioned between the cover and the rear gas supply ports, and
wherein a flow rate of the dry gas supplied from the front gas supply ports is gradually increased at a predetermined ramp rate for a predetermined period of time under a control of a control device.

9. The method of claim 1 , wherein, after said opening, the dry gas is supplied at a third flow rate smaller than or equal to the first flow rate and greater than the second flow rate, and then the dry gas is supplied at a fourth flow rate smaller than the third flow rate and greater than or equal to the second flow rate before said closing.

10. The method of claim 9 , wherein, a flow rate of the dry gas starts increasing with a predetermined ramp rate from the second flow rate at the beginning of said opening until the flow rate reaches the third flow rate.

11. The method of claim 9 , wherein, after said closing, a flow rate of the dry gas is increased from the fourth flow rate and a post purge is performed at the first flow rate and the third flow rate.

Assignees

• Tokyo Electron Ltd

Inventors

• Kaise Seiichi
• Amemiya Shigeki
• Onodera Shinobu
• Fujita Hiroki
• Nishino Masaru
• Rikukawa Atsushi

Classifications

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/3406 Primary

  involving removal of lid, door or cover · CPC title

• H01L21/67772 Primary

  Electricity · mapped topic

• H01L21/67393

  Electricity · mapped topic