Temperature measurement apparatus and method
US-9500537-B2 · Nov 22, 2016 · US
Temperature measurement apparatus and method
US9304050B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9304050-B2 |
| Application number | US-201314070714-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 4, 2013 |
| Priority date | Mar 10, 2008 |
| Publication date | Apr 5, 2016 |
| Grant date | Apr 5, 2016 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetector that measures an interference between the first reflected reference beam and a reflected measurement beam obtained by the measurement beam reflected from a target object; a second photodetector that measures an intensity of the second reflected reference beam; and a temperature calculation unit. The temperature calculation unit calculates a location of the interference by subtracting an output signal of the second photodetector from an output signal of the first photodetector, and calculates a temperature of the target object from the calculated location of the interference.
First claim
Opening claim text (preview).
What is claimed is: 1. A temperature measurement method, comprising: splitting a low coherence light beam into a reference beam and a measurement beam; radiating the reference beam onto a reference beam reflector while radiating the measurement beam onto a target object; measuring an interference between the reference beam reflected from the reference beam reflector and the measurement beam reflected from the target object while changing an optical path length of the reflected…
Assignees
Inventors
Classifications
- G01K11/00Primary
Physics · mapped topic
- G01K11/125Primary
Physics · mapped topic
Physics · mapped topic
- G01J5/08Primary
Physics · mapped topic
Physics · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US9304050B2 cover?
- A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetec…
- Who is the assignee on this patent?
- Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification G01K11/00. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 05 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).