Texturing of monocrystalline semiconductor substrates to reduce incident light reflectance

Patent metadata

Field	Value
Publication number	US-9303207-B2
Application number	US-201414295262-A
Country	US
Kind code	B2
Filing date	Jun 3, 2014
Priority date	Aug 28, 2012
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

Monocrystalline semiconductor substrates are textured with alkaline solutions to form pyramid structures on their surfaces to reduce incident light reflectance and improve light absorption of the wafers. The alkaline baths include hydantoin compounds and derivatives thereof in combination with alkoxylated glycols to inhibit the formation of flat areas between pyramid structures to improve the light absorption.

First claim

What is claimed is:

1. A texturing composition consisting of one or more compounds chosen from hydantoin and hydantoin derivatives, one or more alkoxylated glycols and one or more alkaline compounds selected from the group consisting of potassium hydroxide, sodium hydroxide, lithium hydroxide, quaternary ammonium hydroxides, ammonium hydroxide and alkanolamines, and one or more organic solvents having a flash point of 75° C. or greater, water and optionally one or more oxygen scavengers.

2. The composition of claim 1 , wherein the one or more of hydantoin and hydantoin derivatives range from 0.001 wt % to 1 wt % of the composition.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Toben Michael P
• Barr Robert K
• O'Connor Corey

Classifications

• H10F77/703 Primary

  of the semiconductor bodies, e.g. textured active layers · CPC title

• H10F19/00

  Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules · CPC title

• H10F77/70

  Surface textures, e.g. pyramid structures · CPC title

• H10F71/00 Primary

  Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00) · CPC title

• C09K13/02

  containing an alkali metal hydroxide · CPC title