Electron gun and charged particle beam device having an aperture with flare-suppressing coating

Patent metadata

Field	Value
Publication number	US-9293293-B2
Application number	US-201214240333-A
Country	US
Kind code	B2
Filing date	May 22, 2012
Priority date	Aug 22, 2011
Publication date	Mar 22, 2016
Grant date	Mar 22, 2016

Abstract

The objective of the present application is to suppress the occurrence of flares and to reduce the amount of secondary electrons arising at an aperture provided to the lead-out electrode of an electron gun. By coating a thin film having a low rate of secondary electron emission such as carbon onto the aperture of a lead-out electrode closest to an electron source in an electron gun, it is possible to reduce the amount of secondary electrons arising. Secondary electrons arising at the lead-out electrode, are reduced, and so as a result, flare is reduced. By incorporating two apertures to the lead-out electrode, and applying to the two apertures a potential that is equipotential to the lead-out electrode, it is possible to eliminate an electric field from seeping from under to over the lead-out electrode. Secondary electrons arising when an electron beam impacts the lead-out electrode cease to incur force in the direction of passage from the lead-out electrode, and consequently there is a reduction in flares.

First claim

The invention claimed is:

1. An electron gun comprising:
an electron source;
an extracting electrode configured to apply an electric field to the electron source for extracting electrons from the electron source, the extracting electrode including one or more aperture plates each having an opening configured to pass a part of electrons from the electron source; and
an accelerating electrode configured to accelerate electrons extracted using the extracting electrode at a predetermined accelerating voltage, wherein:
a surface of at least an aperture plate of the extracting electrode closest to the electron source is coated with a material having a secondary electron emission rate of 0.6 or less when irradiation energy of primary electrons colliding against the aperture ranges from 2 to 3 kV, the surface being irradiated with the electrons extracted using the extracting electrode,
a base material of the aperture plate provided on the extracting electrode is thinner than the extracting electrode, and
the coating material applied to the surface of the aperture plate is carbon.

2. The electron gun according to claim 1 , wherein the electron gun is a Schottky electron gun or a field emission electron gun.

3. The electron gun according to claim 1 , wherein:
the extracting electrode is provided with an upper aperture plate and a lower aperture plate, the upper aperture plate being closer to the electron source than the lower aperture plate, and
a potential of the upper and lower aperture plates is made equal to a potential of the extracting electrode.

4. The electron gun according to claim 3 , wherein in the upper and lower aperture plates provided on the extracting electrode, an inner diameter of an opening of the lower aperture plate is greater than an inner diameter of an opening of the upper aperture plate.

5. The electron gun according to claim 4 , wherein:
the electron gun is a Schottky electron gun, and
a distance between the upper and lower aperture plates provided on the extracting electrode is one time the inner diameter of the opening of the lower aperture plate or more.

6. The electron gun according to claim 4 , wherein:
the electron gun is a field emission electron gun, and
a distance between the upper and lower aperture plates provided on the extracting electrode is twice the inner diameter of the opening of the lower aperture plate or more.

7. A charged particle beam device comprising:
a main body including the electron gun according to claim 1 ;
a power supply configured to supply a voltage or an electric current for driving the main body; and
a controller configured to control the main body by controlling an output of the power supply.

8. The electron gun according to claim 1 , wherein a thickness of the coating material is more than or equal to 50 nm.

9. The electron gun according to claim 8 , wherein the thickness of the coating material is less than or equal to 500 nm.

10. The electron gun according to claim 8 , wherein the thickness of the coating material is less than or equal to 200 nm.

11. The electron gun according to claim 1 , wherein a thickness of the base material of the aperture plate is 10 to 50 nm.

Assignees

• Watanabe Shun-Ichi
• Onishi Takashi
• Ose Yoichi
• Nakamura Kuniyasu
• Moriyama Masaru
• Suzuki Tomonori
• Hitachi High Tech Corp

Inventors

• Watanabe Shun-Ichi
• Onishi Takashi
• Ose Yoichi
• Nakamura Kuniyasu
• Moriyama Masaru
• Suzuki Tomonori

Classifications

• H01J2237/06316

  Schottky emission · CPC title

• H01J2237/0213

  Avoiding deleterious effects due to interactions between particles and tube elements · CPC title

• H01J37/065 Primary

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title

• H01J2237/045

  Diaphragms · CPC title

• H01J2237/026

  Shields · CPC title