Electrostatic chucking device

Patent metadata

Field	Value
Publication number	US-9287156-B2
Application number	US-201414155591-A
Country	US
Kind code	B2
Filing date	Jan 15, 2014
Priority date	Jan 18, 2013
Publication date	Mar 15, 2016
Grant date	Mar 15, 2016

Abstract

The electrostatic chucking device 1 of the invention includes an electrostatic chucking portion 2 which includes a plate-like body 11 , a top surface 11 a of which is used as a mounting surface that mounts a plate-like specimen W, an electrostatic adsorption electrode 12 provided in the plate-like body 11 and a power-feeding terminal 13 that applies a direct-current voltage to the electrostatic adsorption electrode 12 ; and a base portion 31 that supports the electrostatic chucking portion 2 , in which the plate-like body 11 is a corrosion-resistant ceramic, a circular insulation member 21 is provided in a circumferential edge portion between the electrostatic chucking portion 2 and the base portion 31 , and a heat radiation plate 34 is provided on the top surface 31 a of the base portion 31.

First claim

The invention claimed is:

1. An electrostatic chucking device comprising:
an electrostatic chucking portion which includes a plate-like body, a principal surface of which is used as a mounting surface that mounts a plate-like specimen, an electrostatic adsorption electrode provided in the plate-like body and a power-feeding terminal that applies a direct-current voltage on the electrostatic adsorption electrode; and
a base stage that is provided on the other principal surface and supports the electrostatic chucking portion,
wherein the plate-like body is made of a corrosion-resistant ceramic, and
a circular insulation member is provided in a circumferential edge portion between the electrostatic chucking portion and the base stage, and a heat radiation plate is provided on a principal surface of the base stage on an electrostatic chucking portion side.

2. The electrostatic chucking device according to claim 1 , wherein the corrosion-resistant ceramic is made of one or two or more selected from a group consisting of yttrium aluminum oxide composite oxides, rare earth element-added yttrium aluminum oxide composite oxides and yttrium oxide.

3. The electrostatic chucking device according to claim 1 , wherein the heat radiation plate is made of metal or an organic resin having thermal conductivity.

4. The electrostatic chucking device according to claim 1 , wherein the mounting surface includes a plurality of protrusion portions having a diameter smaller than the thickness of the plate-like specimen.

5. The electrostatic chucking device according to claim 1 , wherein the surface roughness Ra of an end surface of the power-feeding terminal on an electrostatic adsorption electrode side is in a range of 0.05 μm to 1.0 μm.

6. The electrostatic chucking device according to claim 1 , wherein an insulation layer is provided under the electrostatic adsorption electrode, and the insulation layer and the heat radiation plate are adhered to each other via an organic adhesive layer.

7. The electrostatic chucking device according to claim 6 , wherein the circular insulation member is provided to surround the electrostatic adsorption electrode, the organic adhesive layer and the heat radiation plate, and the distance between the electrostatic adsorption electrode and the base stage is larger than the distance between the circular insulation member and the base stage.

8. The electrostatic chucking device according to claim 1 , wherein the circular insulation member is made of an insulating ceramic which has a thermal conductivity which is larger than that of the corrosion-resistant ceramic of the plate-like body.

Assignees

• Sumitomo Osaka Cement Co Ltd

Inventors

• Moriya Yoshiaki
• Miura Yukio
• Maeta Shinichi

Classifications

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H01L21/67103

  Electricity · mapped topic

• H01L21/6833 Primary

  Electricity · mapped topic