Conductive thin film comprising silicon-carbon composite as printable thermistors

Patent metadata

Field	Value
Publication number	US-9281104-B2
Application number	US-201414451444-A
Country	US
Kind code	B2
Filing date	Aug 5, 2014
Priority date	Mar 11, 2014
Publication date	Mar 8, 2016
Grant date	Mar 8, 2016

Abstract

A method of fabricating a temperature sensing device based on printed silicon-carbon nanocomposite film is disclosed. This method includes high-crystal-quality Si nanoparticles (NPs) homogeneously mixed with carbon NPs and Si—C nanocomposites printed as negative temperature coefficient (NTC) thermistor. These mixtures of Si and C NPs are formulated into screen printing paste with acrylic polymer binder and ethylene glycol (EG) as solvent. This composite paste can be successfully printed on flexible substrates, such as paper or plastics, eventually making printable NTC thermistors quite low-cost. Si and carbon powders have size range of 10 nanometers to 100 micrometers and are mixed together with weight ratios of 100:1 to 10:1. More carbon content, higher conductivity of printed Si—C nanocomposite films keeping similar sensitivity of high-quality Si NPs. With homogeneous distribution of carbon particles in printed films, electrons can tunnel from silicon to carbon and high-conductivity carbon microclusters enhanced hopping process of electrons in printed nanocomposite film. The measured sensitivity 7.23%/° C. of printed Si—C nanocomposite NTC thermistor is approaching the reported value of 8.0-9.5%/° C. for intrinsic silicon bulk material near room temperature, with the quite low resistance of 10 kΩ-100 kΩ. This NTC thermistor is quite suitable for low-cost readout circuits and the integrated systems target to be disposable temperature sensors.

First claim

What is claimed is:

1. A negative temperature coefficient thin film thermistor, comprising:
a substrate;
a pair of electrodes on the substrate; and
a thin film on the substrate, covering the pair of electrodes, and including a composite of silicon nanoparticles with a size less than 100 nanometers (nm) and carbon nanoparticles with a size less than 100 nm,
wherein the carbon nanoparticles account for 5%-10% by weight of the composite, the carbon nanoparticles are formed as aggregated clusters around the silicon nanoparticles to enhance conductivity of the composite without forming complete conductive paths of carbon nanoparticles in order to maintain a negative temperature coefficient property of the composite.

2. The negative temperature coefficient thin film thermistor of claim 1 , wherein the carbon nanoparticles have an electrical conductivity of at least 100 S/cm.

3. The negative temperature coefficient thin film thermistor of claim 1 , wherein a respective size of the silicon nanoparticles and the carbon nanoparticles is 20 nm-100 nm, or 40-60 nanometers.

4. The negative temperature coefficient thin film thermistor of claim 1 , wherein the silicon nanoparticles are selected from doped silicon or nondoped silicon, and the carbon nanoparticles are selected from the group consisting of carbon blacks, graphite flakes and graphene nanoplatelets.

5. The negative temperature coefficient thin film thermistor of claim 1 further comprising:
a binder, wherein the binder is selected from the group consisting of acrylic polymer, epoxy, silicone (polyorganosiloxanes), polyurethanes, polyimides, silanes, germanes, carboxylates, thiolates, alkoxies, alkanes, alkenes, alkynes and diketonates.

6. A method of producing a negative temperature coefficient thin film thermistor, comprising:
mixing silicon nanoparticles with a size less than 100 nanometers (nm) and carbon nanoparticles with a size less than 100 nm to obtain a homogenized Silicone-Carbon (Si—C) composite;
mixing the Si—C composite with a binder and a thinner to obtain a temperature sensitive ink; and
printing the ink on a substrate with electrodes thereon to obtain the negative temperature coefficient thin film thermistor;
wherein the carbon nanoparticles account for 5%-10% by weight of the Si—C composite, and the carbon nanoparticles are formed as aggregated clusters around silicon nanoparticles to enhance conductivity of the Si—C composite without forming complete conductive paths of carbon nanoparticles and while maintaining the negative temperature coefficient property of the Si—C composite.

7. The method of claim 6 further comprising:
curing the thin film thermistor thermally to densify the Si—C composite and to dry the thinner.

8. The method of claim 6 , wherein a respective size of the silicon nanoparticles and the carbon nanoparticles is 20 nm-100 nm or 40 nm-60 nm.

9. The method of claim 6 , wherein the silicon nanoparticles are selected from doped silicon or nondoped silicon, and the carbon nanoparticles are selected from the group consisting of carbon blacks, graphite flakes and graphene nanoplatelets.

10. The method of claim 6 , wherein the binder is selected from the group consisting of acrylic polymer, epoxy, silicone (polyorganosiloxanes), polyurethanes, polyimides, silanes, germanes, carboxylates, thiolates, alkoxies, alkanes, alkenes, alkynes and diketonates; and the thinner is selected from the group consisting of ethylene glycol, polyethylene glycol, hydrocarbons, alcohols, ethers, organic acids, esters, aromatics, amines, as well as water, and mixtures thereof.

11. A negative temperature coefficient thin film thermistor, comprising:
a substrate;
a thin film that includes a Silicon-Carbon (Si—C) composite of silicon nanoparticles with a size less than 100 nanometers (nm) and carbon nanoparticles with a size less than 100 nm; and
a pair of electrodes on the substrate and contacting the thin film,
the carbon nanoparticles account for 5%-10% by weight of the Si—C composite, and the carbon nanoparticles are formed as aggregated clusters around the silicon nanoparticles to enhance conductivity of the Si—C composite without affecting temperature sensitivity of the negative temperature coefficient thin film thermistor.

Assignees

• Nano & Advanced Materials Inst Ltd

Inventors

• Sun Caiming

Classifications

• H01C7/049

  mainly consisting of organic or organo-metal substances · CPC title

• H01C17/06586

  composed of organic material · CPC title

• H01C7/048 Primary

  Carbon or carbides · CPC title

• H01C17/0652

  containing carbon or carbides · CPC title

• H01C17/06593

  characterised by the temporary binder · CPC title