Method of nano-patterning a foil surce

Patent metadata

Field	Value
Publication number	US-9275800-B2
Application number	US-201314134112-A
Country	US
Kind code	B2
Filing date	Dec 19, 2013
Priority date	Dec 19, 2013
Publication date	Mar 1, 2016
Grant date	Mar 1, 2016

Abstract

A method for patterning a metal substrate includes a series of surface treatments to control tunnel initiation at a micron or sub-micron level. In particular, the series of surface treatments include forming a hydration layer which acts as a mask while etching the surface of the metal substrate. The hydration layer mask enables control of the tunnel initiation on a micron or sub-micron level because the etching does not undercut the interface between the metal substrate and the hydration layer. As a result, the tunnels can be initiated in an orthogonal direction and closer together, thereby increasing the tunnel density.

First claim

What is claimed is:

1. A method for patterning a metal substrate, the method comprising the steps of:
applying a photo-sensitive layer on a surface of a metal substrate;
forming a patterned surface on the photo-sensitive layer;
removing at least a portion of the patterned surface of the photo-sensitive layer to create a patterned resist and a plurality of unmasked areas on the metal substrate;
forming a hydrate layer in at least one of the unmasked areas;
removing the patterned resist to expose at least one portion of the surface of the metal substrate; and
etching at least one exposed portion of the surface of the metal substrate to initiate tunnels in the metal substrate, thereby forming a patterned metal substrate,
wherein the hydrate layer acts as a mask during the etching.

2. The method of claim 1 , wherein the metal substrate is an aluminum foil.

3. The method of claim 1 , wherein the photo-sensitive layer is an ultraviolet-curable photopolymer.

4. The method of claim 1 , wherein the patterned surface comprises an array microstructures and the microstructures have a width of in a range from 0.1 to 5 μm and a period in a range from 1 to 3 μm.

5. The method of claim 1 , wherein the step of removing at least a portion of the patterned surface comprises etching the patterned surface with a reactive plasma.

6. The method of claim 1 , wherein the metal substrate has a first surface and a second surface and the method of claim 1 is performed on both the first surface and the second surface.

7. The method of claim 1 , wherein the patterned resist has the same array configuration and is dimensionally proportional to the patterned surface.

8. The method of claim 1 , wherein the step of forming a hydrate layer comprises reacting deionized water with the substrate surface to form a metal hydrate.

9. The method of claim 1 , wherein the hydrate layer forms a mesh on the surface of the metal substrate leaving exposed metal substrate areas that have a width of in a range from 0.1 to 5 μm and a period in a range from 1 to 3 μm.

10. A method of manufacturing a patterned aluminum foil for use in an electrolytic capacitor, the method comprising the steps of:
applying a photo-sensitive layer on a surface of an aluminum foil;
forming a patterned surface on the photo-sensitive layer;
plasma etching the patterned surface of the photo-sensitive layer to create a patterned resist and unmasked areas on the aluminum foil;
forming a hydrate layer mesh in the unmasked areas;
removing the patterned resist to expose the surface of the aluminum foil; and
electrochemically etching the exposed surface of the aluminum foil to initiate tunneling of the aluminum foil to form the patterned aluminum foil surface,
wherein the hydrate layer mesh acts as a mask during the electrochemical etching.

11. The method of claim 10 , wherein the photo-sensitive layer is an ultraviolet-curable photopolymer.

12. The method of claim 10 , wherein the patterned surface comprises an array of microstructures and the microstructures have a width of in a range from 0.1 to 5 μm and a period in a range from 1 to 3 μm.

13. The method of claim 10 , wherein the aluminum foil has a first surface and a second surface and the method of claim 11 is performed on both the first surface and the second surface.

14. The method of claim 10 , wherein the patterned resist has the same array configuration and is dimensionally proportional to the patterned surface.

15. The method of claim 10 , wherein the step of forming a hydrate layer mesh comprises reacting deionized water with the substrate surface to form metal hydrate.

16. The method of claim 10 , wherein the hydrate layer mesh forms a honeycomb configuration on the surface of the aluminum foil leaving exposed aluminum foil areas that have a width of in a range from 0.1 to 5 μm and a period in a range from 1 to 3 μm.

17. The method of claim 10 , wherein the aluminum foil is used as an anode or cathode in the electrolytic capacitor.

18. A method for patterning a metal substrate, the method comprising the steps of:
applying a photo-sensitive layer on a surface of a metal substrate;
forming a patterned surface formed of an array of microstructures on the surface of the photo-sensitive layer;
removing at least a portion of the patterned surface of the photo-sensitive layer to create (i) a patterned resist having a microstructure array configuration corresponding to and dimensionally proportional to the patterned surface and (ii) at least one unmasked portion of the surface of the metal substrate;
forming a hydrate layer mesh in the at least one unmasked portion of the surface of the metal substrate;
removing the patterned resist to expose at least one portion of the surface of the metal substrate; and
etching the at least one exposed portion of the surface of the metal substrate to initiate tunnels in the metal substrate, thereby forming a patterned metal substrate,
wherein the hydrate layer acts as a mask during the etching.

19. The method of claim 18 , wherein the step of removing the patterned resist comprises placing the substrate in an ethyl lactate solution to remove the patterned resist while leaving the hydrate layer mesh intact.

20. The method of claim 18 , wherein the aluminum foil has a first surface and a second surface and the method of claim 18 is performed on both the first surface and the second surface.

Assignees

• Pacesetter Inc

Inventors

• Ribble Bruce
• Hemphill Ralph Jason
• Bowen David

Classifications

• H01G9/055 Primary

  Etched foil electrodes · CPC title

• Y10T428/24917

  including metal layer · CPC title

• H01G9/045

  based on aluminium · CPC title