Forming memory using high power impulse magnetron sputtering

Patent metadata

Field	Value
Publication number	US-9249498-B2
Application number	US-82509110-A
Country	US
Kind code	B2
Filing date	Jun 28, 2010
Priority date	Jun 28, 2010
Publication date	Feb 2, 2016
Grant date	Feb 2, 2016

Abstract

Forming memory using high power impulse magnetron sputtering is described herein. One or more method embodiments include forming a resistive memory material on a structure using high power impulse magnetron sputtering (HIPIMS), wherein the resistive memory material is formed on the structure in an environment having a temperature of approximately 400 degrees Celsius or less.

First claim

What is claimed is:

1. A method of processing memory, comprising:
forming a resistive memory material from a target on a structure by:
forming plasma comprising the resistive memory material from the target using high power impulse magnetron sputtering (HIPIMS); and
forming the resistive memory material in the plasma on the structure;

wherein forming the resistive memory material on the structure includes providing a number of pulses to the target, wherein each pulse of the number of pulses has a constant amount of power of at least 1 megawatt for a duration of the pulse, wherein each pulse of the number of pulses has a duration of approximately 1 to 300 microseconds;
wherein the resistive memory material is formed on the structure in an environment having a temperature of approximately 400 degrees Celsius or less;
wherein the resistive memory material included in the target is Pr (1-x) Ca x MnO 3 (PCMO); and
wherein the resistive memory material is formed on the structure such that the resistive memory material on the structure has a thickness of less than 100 Angstroms.

2. The method of claim 1 , wherein the method of providing the number of pulses includes providing a second pulse to the target approximately 100 milliseconds after a first pulse is provided to the target.

3. The method of claim 2 , wherein the first and second pulses are provided to the target for a duration of approximately 100 to 200 microseconds.

4. A method of processing memory, comprising:
forming a resistive memory material from a target on a structure by:
forming plasma comprising the resistive memory material from the target using high power impulse magnetron sputtering (HIPIMS); and
forming the resistive memory material in the plasma on the structure;

wherein forming the resistive memory material on the structure includes providing a number of pulses to the target, wherein each pulse of the number of pulses has a duration of 1 to 300 microseconds and a constant amount of power of at least 1 megawatt for the duration of the pulse;
wherein the resistive memory material is formed on the structure in an environment having a temperature of approximately 400 degrees Celsius or less and such that the resistive memory material on the structure has an ionization of at least 80%; and
wherein the resistive memory material included in the target is Pr (1-x) Ca x MnO 3 (PCMO); and
wherein the resistive memory material is formed on the structure such that the resistive memory material on the structure has a thickness of less than 100 Angstroms.

5. The method of claim 2 , wherein forming the resistive memory material on the structure includes providing no additional pulses to the target after the first pulse is provided to the target and before the second pulse is provided to the target.

6. The method of claim 4 , wherein each pulse of the number of pulses have a power of approximately 18 megawatts.

7. The method of claim 4 , wherein each pulse of the number of pulses has a duration of approximately 100 microseconds.

8. The method of claim 4 , wherein the resistive memory material is formed on the structure such that the resistive memory material on the structure has an ionization of approximately 80% to 95%.

9. A method of processing memory, comprising:
forming a resistive random access memory (RRAM) cell material from a target on a memory structure by:
forming plasma comprising the RRAM cell material from the target using high power impulse magnetron sputtering (HIPIMS); and
forming the RRAM cell material in the plasma on the memory structure;

wherein forming the RRAM cell material on the memory structure includes providing a number of pulses to the target, wherein each pulse of the number of pulses has a duration of approximately 1 to 300 microseconds and a constant amount of power of at least 1 megawatt for the duration of the pulse;
wherein the RRAM cell material is formed on the memory structure in a physical vapor deposition (PVD) chamber having a temperature of approximately 400 degrees Celsius or less;
wherein the RRAM cell material included in the target is Pr( 1-x) Ca x MnO 3 (PCMO); and
wherein the RRAM cell material is formed on the memory structure such that the RRAM cell material on the memory structure has a thickness of 40 to 70 Angstroms.

10. The method of claim 9 , wherein the method includes providing a constant supply of power to the memory structure while forming the RRAM cell material on the memory structure.

11. The method of claim 9 , wherein:
the memory structure includes an opening; and
the RRAM cell material is formed in the opening.

12. The method of claim 9 , wherein the method includes forming the RRAM cell material on the memory structure such that the RRAM cell material on the memory structure is crystallized.

Assignees

• Hu Yongjun Jeff
• Mcteer Everett A
• Smythe Iii John A
• Sandhu Gurtej S
• Micron Technology Inc

Inventors

• Hu Yongjun Jeff
• Mcteer Everett A
• Smythe Iii John A
• Sandhu Gurtej S

Classifications

• H10P14/69396

  the material containing at least one rare earth metal element, e.g. oxides of lanthanides, scandium or yttrium · CPC title

• C23C14/35

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title

• H01L21/02192

  Electricity · mapped topic

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• H01L45/146

  Electricity · mapped topic