Mold for forming complex 3D MEMS components

Patent metadata

Field	Value
Publication number	US-9249015-B2
Application number	US-201313778526-A
Country	US
Kind code	B2
Filing date	Feb 27, 2013
Priority date	Feb 27, 2013
Publication date	Feb 2, 2016
Grant date	Feb 2, 2016

Abstract

A mold structure having high-precision multi-dimensional components includes: depositing an oxide layer on a top surface of a plurality of semiconductor substrates, patterning a design integrated in one or more of the oxide layers; repositioning the substrates to enable the oxide layers make contact with one another; bonding in sequential order the repositioned substrates using a dielectric bonding, forming a three dimension (3D) mold; filling the 3D mold with filling material and removing the overburden filling material present on a top surface of the component.

First claim

What is claimed is:

1. A method of forming a mold structure having high-precision multi-dimensional components comprising:
forming a first oxide layer on a top surface of a first semiconductor substrate and patterning a first design in the first oxide layer;
forming a second oxide layer on a top surface of a second semiconductor substrate and patterning a second design in the second oxide layer wherein the first design is different from the second design;
repositioning said substrates to enable said first and second oxide layers to make partial contact with one another such that a portion of one of the first oxide layer and the second oxide layer avoids contact with an other of the first oxide layer and the second oxide layer such that there is a gap between the portion of the one of the first oxide layer and the second oxide layer and the semiconductor substrate on which the other of the first oxide layer and the second oxide layer is formed;
bonding in sequential order said repositioned substrates using dielectric bonding, forming a three dimension (3D) mold; and
filling said 3D mold with a filling material including filling the gap with the filling material and removing an overburden of said filling material present on a top surface of said 3D mold.

2. The method of claim 1 wherein said plurality of substrates is made of silicon, silicon germanium, quartz, polymers, or organic compounds.

3. The method of claim 1 further comprising backside grinding a top semiconductor substrate with an endpoint of a grinding process on one of the first oxide layer and second oxide layer upon removal of the semiconductor substrate.

4. The method of claim 1 wherein said filling said 3D mold is performed with bulk metallic glass employing thermo-compression molding or blowmolding.

5. The method of claim 1 wherein said overburden removal is performed using backside grinding from a side of said 3D mold in which said filling material is introduced.

6. The method of claim 1 , further comprising forming a cavity of said 3D mold filled with material.

7. The method of claim 6 , wherein said filling material comprises a metallic glass heated at elevated temperatures above a glass transition temperature using thermoplastic molding.

8. The method of claim 5 , further comprising removing said mold.

9. The method of claim 1 , wherein said dielectric bonding comprises fusion bonding wherein said 3D mold comprises a mold cavity in said top surface of said 3D mold, said mold cavity consisting of multiple exposed patterned layers.

10. The method of claim 1 , wherein each of said first oxide layer and second oxide layer is a silane based oxide and said mold filling material is BMG.

11. The method of claim 1 further comprising using said first oxide layer and said second oxide layer as patterned layers of said mold, achieving a fine micron- and sub-micron scale variation in all of said 3D molds.

12. The method of claim 1 , further comprising a top substrate of said 3D mold contacting the overburden of filling material, wherein an interface between a first oxide layer or a second oxide layer and the first semiconductor substrate or the second semiconductor substrate, respectively, provide an endpoint indicator for said overburden removal.

13. The method of claim 9 further comprising:
activating said first and second oxide layers by performing a wet chemical process prior to said fusion bonding;
removing said overburden by grinding or by using hot scraping;
using an interface between said overburden and said first semiconductor substrate or said second semiconductor substrate for said endpoint detection of said overburden removal; and
removing said 3D mold using potassium hydroxide (KOH).

Assignees

• IBM
• Univ Yale

Inventors

• Kinser Emily R
• Schroers Jan
• Kumar Golden

Classifications

• B22C9/06

  Permanent moulds for shaped castings (moulds for ingots B22D7/06) · CPC title

• B81C99/009 Primary

  Manufacturing the stamps or the moulds · CPC title