Stamps and methods of forming a pattern on a substrate

Patent metadata

Field	Value
Publication number	US-10005308-B2
Application number	US-201514669612-A
Country	US
Kind code	B2
Filing date	Mar 26, 2015
Priority date	Feb 5, 2008
Publication date	Jun 26, 2018
Grant date	Jun 26, 2018

Abstract

Methods for fabricating stamps and systems for patterning a substrate, and devices resulting from those methods are provided.

First claim

What is claimed is:

1. A stamp, comprising:
a structure having a first surface and a second surface, and comprising:
transparent regions comprising a material formulated to transmit ultraviolet radiation therethrough; and
non-transparent regions adjacent the transparent regions; and

a polymerizable material directly on surfaces of the transparent regions and the non-transparent regions defining the first surface of the structure.

2. The stamp of claim 1 , wherein the transparent regions comprise glass, calcium fluoride, diamond, a transparent plastic, or a transparent polymer material.

3. The stamp of claim 1 , wherein the non-transparent regions comprise an elastomeric polymer material.

4. The stamp of claim 1 , wherein the transparent regions and the non-transparent regions each extend from the first surface to the second surface.

5. The stamp of claim 1 , wherein the polymerizable material comprises a neutral wetting material.

6. The stamp of claim 1 , wherein the transparent regions and the non-transparent regions exhibit substantially the same widths as one another.

7. The stamp of claim 1 , wherein the polymerizable material comprises a random block copolymer.

8. The stamp of claim 1 , wherein the polymerizable material comprises PS-r-PMMA.

9. The stamp of claim 1 , wherein the polymerizable material is formulated to be cross-linked upon exposure to at least one of ultraviolet radiation and deep ultraviolet radiation.

10. The stamp of claim 1 , wherein the non-transparent regions comprise poly(dimethylsiloxane).

11. The stamp of claim 1 , wherein the transparent regions comprise SiO 2 .

12. The stamp of claim 1 , wherein the transparent regions comprise calcium fluoride.

13. The stamp of claim 1 , wherein the transparent regions comprise diamond.

14. The stamp of claim 1 , wherein:
the transparent regions of the structure comprise quartz, calcium fluoride, or diamond;
the non-transparent regions of the structure comprise poly(dimethylsiloxane); and
the polymerizable material comprises PS-r-PMMA.

15. A method of forming a pattern on a substrate, comprising:
forming a stamp comprising:
a structure comprising:
transparent regions comprising a material formulated to transmit ultraviolet radiation therethrough; and
non-transparent regions adjacent the transparent regions; and

a polymerizable material directly on surfaces of the transparent regions and the non-transparent regions of the structure;

contacting the substrate with the stamp to apply the polymerizable material to the substrate;
transmitting radiation through the transparent regions of the structure to polymerize portions of the polymerizable material and form a polymeric material comprising polymerized portions and non-polymerized portions; and
removing the structure from the polymeric material.

16. The method of claim 15 , further comprising, removing the non-polymerized portions of the polymeric material relative to the polymerized portions of the polymeric material to expose portions of the substrate.

17. The method of claim 16 , further comprising:
forming a block copolymer material over the polymerized portions of the polymeric material and the exposed portions of the substrate; and
annealing the block copolymer material to form a self-assembled block copolymer material.

18. The method of claim 17 , further comprising selectively removing one block of the self-assembled block copolymer material relative to another block of the self-assembled block copolymer material.

Assignees

• Micron Technology Inc

Inventors

• Millward Dan B
• Sandhu Gurtej S

Classifications

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• B05D1/283

  Transferring monomolecular layers or solutions of molecules adapted for forming monomolecular layers from carrying elements · CPC title

• B81C2201/0149

  Forming nanoscale microstructures using auto-arranging or self-assembling material · CPC title

• Y02C20/30

  of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6] · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title