Filtration filter, filtration method, production method of purified liquid chemical product for lithography, and method of forming resist pattern
US-10429738-B2 · Oct 1, 2019 · US
US9238203B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9238203-B2 |
| Application number | US-201013514336-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 14, 2010 |
| Priority date | Dec 14, 2009 |
| Publication date | Jan 19, 2016 |
| Grant date | Jan 19, 2016 |
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Described herein are microperforated polymeric films comprising: opposed first and second surfaces separated by a first certain distance ( 40 a ); and a plurality of channels perpendicular to the first and second surfaces, wherein a first opening ( 20 a - c ) of a channel intersects the first surface and a second opening ( 22 a - c ) of the channel intersects the second surface; wherein the diameter of the first opening is larger than the diameter of the second opening and the second openings on the second surface are spaced apart by a second certain distance ( 50 a ); wherein the ratio of the first certain distance to the second certain distance is at least 0.25; and further wherein the second surface has an open area of at least 10%. Also described are methods of making and using such microperforated polymeric films.
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What is claimed is: 1. A method of forming a microperforated polymeric film comprising: providing a polymeric film comprising opposed first and second surfaces and a plurality of cavities there between, wherein the plurality of cavities is open to the first surface and includes a cavity surface wherein the cavity surface intersects the first surface, wherein the polymeric film comprises a film thickness of 50 to 800 micrometers; providing a liquid between a support surface and the first surface; and exposing the second surface to a thermal treatment to perforate the polymeric film in the areas covering the plurality of cavities. 2. The method of claim 1 wherein a layer of gas separates the liquid from the apex of the cavity of at least some of the plurality of cavities. 3. The method of claim 1 , wherein the fluid is water. 4. The method of claim 1 , wherein the support surface is a chilled roller. 5. The method of claim 1 , wherein the thermal treatment is one of: flame, hot air, radiant heat, and combinations thereof. 6. The method of claim 1 , wherein the support surface comprises at least one of: a texture, a coating, and combinations thereof. 7. The method of claim 1 , wherein the diameter of the cavity surface is at least 100 micrometers. 8. The method of claim 1 , wherein the surface of the support surface is smooth.
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